10/3/2011	12:09:46 AM	Helium valve closed
10/3/2011	12:09:46 AM	BCl3 valve closed
10/3/2011	12:09:46 AM	PH3 valve closed
10/3/2011	12:09:46 AM	SiCl4 pre valve closed
10/3/2011	12:09:46 AM	SiCl4 post valve closed
10/3/2011	12:09:46 AM	Main Vac valve closed
10/3/2011	12:09:46 AM	Bypass valve closed
10/3/2011	12:09:46 AM	Bubbler valve closed
10/3/2011	12:09:46 AM	H2 valve opened
10/3/2011	12:09:46 AM	Helium MFC set to  0.000000
10/3/2011	12:09:46 AM	H2 MFC set to  500.000000
10/3/2011	12:09:46 AM	BCl3 MFC set to  0.000000
10/3/2011	12:09:46 AM	PHl3 MFC set to  0.000000
10/3/2011	12:09:46 AM	SiCl4 MFC set to  0.000000
10/3/2011	12:09:46 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	12:09:47 AM	Tube furnace set to 1000
10/3/2011	12:10:42 AM	Helium valve closed
10/3/2011	12:10:42 AM	BCl3 valve closed
10/3/2011	12:10:42 AM	PH3 valve closed
10/3/2011	12:10:42 AM	SiCl4 pre valve closed
10/3/2011	12:10:42 AM	SiCl4 post valve closed
10/3/2011	12:10:42 AM	Main Vac valve closed
10/3/2011	12:10:42 AM	Bypass valve closed
10/3/2011	12:10:42 AM	H2 valve opened
10/3/2011	12:10:42 AM	Bubbler valve opened
10/3/2011	12:10:42 AM	Helium MFC set to  0.000000
10/3/2011	12:10:42 AM	H2 MFC set to  500.000000
10/3/2011	12:10:42 AM	BCl3 MFC set to  0.000000
10/3/2011	12:10:42 AM	PHl3 MFC set to  0.000000
10/3/2011	12:10:42 AM	SiCl4 MFC set to  0.000000
10/3/2011	12:10:42 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	12:10:42 AM	Tube furnace set to 1000
10/3/2011	12:30:42 AM	Helium valve closed
10/3/2011	12:30:42 AM	PH3 valve closed
10/3/2011	12:30:42 AM	Main Vac valve closed
10/3/2011	12:30:42 AM	Bypass valve closed
10/3/2011	12:30:42 AM	H2 valve opened
10/3/2011	12:30:42 AM	BCl3 valve opened
10/3/2011	12:30:42 AM	SiCl4 pre valve opened
10/3/2011	12:30:42 AM	SiCl4 post valve opened
10/3/2011	12:30:42 AM	Bubbler valve opened
10/3/2011	12:30:42 AM	Helium MFC set to  0.000000
10/3/2011	12:30:42 AM	H2 MFC set to  500.000000
10/3/2011	12:30:42 AM	BCl3 MFC set to  2.500000
10/3/2011	12:30:42 AM	PHl3 MFC set to  0.000000
10/3/2011	12:30:42 AM	SiCl4 MFC set to  50.000000
10/3/2011	12:30:42 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	12:30:42 AM	Tube furnace set to 1000
10/3/2011	12:40:42 AM	Helium valve closed
10/3/2011	12:40:42 AM	BCl3 valve closed
10/3/2011	12:40:42 AM	PH3 valve closed
10/3/2011	12:40:42 AM	SiCl4 pre valve closed
10/3/2011	12:40:42 AM	SiCl4 post valve closed
10/3/2011	12:40:42 AM	Main Vac valve closed
10/3/2011	12:40:42 AM	Bypass valve closed
10/3/2011	12:40:42 AM	H2 valve opened
10/3/2011	12:40:42 AM	Bubbler valve opened
10/3/2011	12:40:42 AM	Helium MFC set to  0.000000
10/3/2011	12:40:42 AM	H2 MFC set to  500.000000
10/3/2011	12:40:42 AM	BCl3 MFC set to  0.000000
10/3/2011	12:40:42 AM	PHl3 MFC set to  0.000000
10/3/2011	12:40:42 AM	SiCl4 MFC set to  0.000000
10/3/2011	12:40:42 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	12:40:42 AM	Tube furnace set to 0
10/3/2011	12:45:42 AM	H2 valve closed
10/3/2011	12:45:42 AM	BCl3 valve closed
10/3/2011	12:45:42 AM	PH3 valve closed
10/3/2011	12:45:42 AM	SiCl4 pre valve closed
10/3/2011	12:45:42 AM	SiCl4 post valve closed
10/3/2011	12:45:42 AM	Main Vac valve closed
10/3/2011	12:45:42 AM	Bypass valve closed
10/3/2011	12:45:42 AM	Helium valve opened
10/3/2011	12:45:42 AM	Bubbler valve opened
10/3/2011	12:45:42 AM	Helium MFC set to  500.000000
10/3/2011	12:45:42 AM	H2 MFC set to  0.000000
10/3/2011	12:45:42 AM	BCl3 MFC set to  0.000000
10/3/2011	12:45:42 AM	PHl3 MFC set to  0.000000
10/3/2011	12:45:42 AM	SiCl4 MFC set to  0.000000
10/3/2011	12:45:42 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	12:45:42 AM	Tube furnace set to 0
10/3/2011	1:15:42 AM	Helium valve closed
10/3/2011	1:15:42 AM	H2 valve closed
10/3/2011	1:15:42 AM	BCl3 valve closed
10/3/2011	1:15:42 AM	PH3 valve closed
10/3/2011	1:15:42 AM	SiCl4 pre valve closed
10/3/2011	1:15:42 AM	SiCl4 post valve closed
10/3/2011	1:15:42 AM	Main Vac valve closed
10/3/2011	1:15:42 AM	Bypass valve closed
10/3/2011	1:15:42 AM	Bubbler valve closed
10/3/2011	1:15:42 AM	Helium MFC set to  0.000000
10/3/2011	1:15:42 AM	H2 MFC set to  0.000000
10/3/2011	1:15:42 AM	BCl3 MFC set to  0.000000
10/3/2011	1:15:42 AM	PHl3 MFC set to  0.000000
10/3/2011	1:15:42 AM	SiCl4 MFC set to  0.000000
10/3/2011	1:15:42 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	1:15:42 AM	Tube furnace set to 0
10/3/2011	1:45:42 AM	Helium valve closed
10/3/2011	1:45:42 AM	H2 valve closed
10/3/2011	1:45:42 AM	BCl3 valve closed
10/3/2011	1:45:42 AM	PH3 valve closed
10/3/2011	1:45:42 AM	SiCl4 pre valve closed
10/3/2011	1:45:42 AM	SiCl4 post valve closed
10/3/2011	1:45:42 AM	Main Vac valve closed
10/3/2011	1:45:42 AM	Bubbler valve closed
10/3/2011	1:45:42 AM	Bypass valve opened
10/3/2011	1:45:42 AM	Helium MFC set to  0.000000
10/3/2011	1:45:42 AM	H2 MFC set to  0.000000
10/3/2011	1:45:42 AM	BCl3 MFC set to  0.000000
10/3/2011	1:45:42 AM	PHl3 MFC set to  0.000000
10/3/2011	1:45:42 AM	SiCl4 MFC set to  0.000000
10/3/2011	1:45:42 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	1:45:42 AM	Tube furnace set to 0
10/3/2011	1:46:32 AM	Helium valve closed
10/3/2011	1:46:32 AM	H2 valve closed
10/3/2011	1:46:32 AM	BCl3 valve closed
10/3/2011	1:46:32 AM	PH3 valve closed
10/3/2011	1:46:32 AM	SiCl4 pre valve closed
10/3/2011	1:46:32 AM	SiCl4 post valve closed
10/3/2011	1:46:32 AM	Main Vac valve closed
10/3/2011	1:46:32 AM	Bubbler valve closed
10/3/2011	1:46:32 AM	Bypass valve opened
10/3/2011	1:46:32 AM	Helium MFC set to  0.000000
10/3/2011	1:46:32 AM	H2 MFC set to  0.000000
10/3/2011	1:46:32 AM	BCl3 MFC set to  0.000000
10/3/2011	1:46:32 AM	PHl3 MFC set to  0.000000
10/3/2011	1:46:32 AM	SiCl4 MFC set to  0.000000
10/3/2011	1:46:32 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	1:46:32 AM	Tube furnace set to 0
10/3/2011	1:48:32 AM	Helium valve closed
10/3/2011	1:48:32 AM	H2 valve closed
10/3/2011	1:48:32 AM	BCl3 valve closed
10/3/2011	1:48:32 AM	PH3 valve closed
10/3/2011	1:48:32 AM	SiCl4 pre valve closed
10/3/2011	1:48:32 AM	SiCl4 post valve closed
10/3/2011	1:48:32 AM	Bypass valve closed
10/3/2011	1:48:32 AM	Bubbler valve closed
10/3/2011	1:48:32 AM	Main Vac valve opened
10/3/2011	1:48:32 AM	Helium MFC set to  0.000000
10/3/2011	1:48:32 AM	H2 MFC set to  0.000000
10/3/2011	1:48:32 AM	BCl3 MFC set to  0.000000
10/3/2011	1:48:32 AM	PHl3 MFC set to  0.000000
10/3/2011	1:48:32 AM	SiCl4 MFC set to  0.000000
10/3/2011	1:48:32 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	1:48:32 AM	Tube furnace set to 0
10/3/2011	1:48:33 AM	Run finished at 1:48 AM
10/3/2011	5:44:58 AM	Main Vac valve closed
10/3/2011	5:45:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/3/2011	5:45:31 AM	Recipe started at 5:45 AM
10/3/2011	5:45:31 AM	Helium valve closed
10/3/2011	5:45:31 AM	H2 valve closed
10/3/2011	5:45:31 AM	BCl3 valve closed
10/3/2011	5:45:31 AM	PH3 valve closed
10/3/2011	5:45:31 AM	SiCl4 pre valve closed
10/3/2011	5:45:31 AM	SiCl4 post valve closed
10/3/2011	5:45:31 AM	Main Vac valve closed
10/3/2011	5:45:31 AM	Bypass valve closed
10/3/2011	5:45:31 AM	Bubbler valve closed
10/3/2011	5:45:31 AM	Helium MFC set to  0.000000
10/3/2011	5:45:31 AM	H2 MFC set to  0.000000
10/3/2011	5:45:31 AM	BCl3 MFC set to  0.000000
10/3/2011	5:45:31 AM	PHl3 MFC set to  0.000000
10/3/2011	5:45:31 AM	SiCl4 MFC set to  0.000000
10/3/2011	5:45:31 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	5:45:32 AM	Tube furnace set to 0
10/3/2011	5:45:35 AM	H2 valve closed
10/3/2011	5:45:35 AM	BCl3 valve closed
10/3/2011	5:45:35 AM	PH3 valve closed
10/3/2011	5:45:35 AM	SiCl4 pre valve closed
10/3/2011	5:45:35 AM	SiCl4 post valve closed
10/3/2011	5:45:35 AM	Main Vac valve closed
10/3/2011	5:45:35 AM	Bypass valve closed
10/3/2011	5:45:35 AM	Bubbler valve closed
10/3/2011	5:45:35 AM	Helium valve opened
10/3/2011	5:45:35 AM	Helium MFC set to  500.000000
10/3/2011	5:45:35 AM	H2 MFC set to  0.000000
10/3/2011	5:45:35 AM	BCl3 MFC set to  0.000000
10/3/2011	5:45:35 AM	PHl3 MFC set to  0.000000
10/3/2011	5:45:35 AM	SiCl4 MFC set to  0.000000
10/3/2011	5:45:35 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	5:45:35 AM	Tube furnace set to 0
10/3/2011	5:46:40 AM	Helium valve closed
10/3/2011	5:46:40 AM	H2 valve closed
10/3/2011	5:46:40 AM	BCl3 valve closed
10/3/2011	5:46:40 AM	PH3 valve closed
10/3/2011	5:46:40 AM	SiCl4 pre valve closed
10/3/2011	5:46:40 AM	SiCl4 post valve closed
10/3/2011	5:46:40 AM	Main Vac valve closed
10/3/2011	5:46:40 AM	Bypass valve closed
10/3/2011	5:46:40 AM	Bubbler valve closed
10/3/2011	5:46:40 AM	Helium MFC set to  0.000000
10/3/2011	5:46:40 AM	H2 MFC set to  0.000000
10/3/2011	5:46:40 AM	BCl3 MFC set to  0.000000
10/3/2011	5:46:40 AM	PHl3 MFC set to  0.000000
10/3/2011	5:46:40 AM	SiCl4 MFC set to  0.000000
10/3/2011	5:46:40 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	5:46:40 AM	Tube furnace set to 0
10/3/2011	5:46:41 AM	Run finished at 5:46 AM
10/3/2011	5:46:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/3/2011	5:46:56 AM	Helium MFC set to  500.000000
10/3/2011	5:46:57 AM	Helium valve opened
10/3/2011	5:47:01 AM	Bubbler valve opened
10/3/2011	5:51:55 AM	Bubbler valve closed
10/3/2011	5:51:56 AM	Helium valve closed
10/3/2011	5:51:59 AM	Helium MFC set to  0.000000
10/3/2011	5:52:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/3/2011	5:52:21 AM	Recipe started at 5:52 AM
10/3/2011	5:52:21 AM	Helium valve closed
10/3/2011	5:52:21 AM	H2 valve closed
10/3/2011	5:52:21 AM	BCl3 valve closed
10/3/2011	5:52:21 AM	PH3 valve closed
10/3/2011	5:52:21 AM	SiCl4 pre valve closed
10/3/2011	5:52:21 AM	SiCl4 post valve closed
10/3/2011	5:52:21 AM	Main Vac valve closed
10/3/2011	5:52:21 AM	Bubbler valve closed
10/3/2011	5:52:21 AM	Bypass valve opened
10/3/2011	5:52:21 AM	Helium MFC set to  0.000000
10/3/2011	5:52:21 AM	H2 MFC set to  0.000000
10/3/2011	5:52:21 AM	BCl3 MFC set to  0.000000
10/3/2011	5:52:21 AM	PHl3 MFC set to  0.000000
10/3/2011	5:52:21 AM	SiCl4 MFC set to  0.000000
10/3/2011	5:52:21 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	5:52:21 AM	Tube furnace set to 0
10/3/2011	5:53:23 AM	Helium valve closed
10/3/2011	5:53:23 AM	H2 valve closed
10/3/2011	5:53:23 AM	BCl3 valve closed
10/3/2011	5:53:23 AM	PH3 valve closed
10/3/2011	5:53:23 AM	SiCl4 pre valve closed
10/3/2011	5:53:23 AM	SiCl4 post valve closed
10/3/2011	5:53:23 AM	Main Vac valve closed
10/3/2011	5:53:23 AM	Bubbler valve closed
10/3/2011	5:53:23 AM	Bypass valve opened
10/3/2011	5:53:23 AM	Helium MFC set to  0.000000
10/3/2011	5:53:23 AM	H2 MFC set to  0.000000
10/3/2011	5:53:23 AM	BCl3 MFC set to  0.000000
10/3/2011	5:53:23 AM	PHl3 MFC set to  0.000000
10/3/2011	5:53:23 AM	SiCl4 MFC set to  0.000000
10/3/2011	5:53:23 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	5:53:23 AM	Tube furnace set to 0
10/3/2011	5:53:53 AM	Helium valve closed
10/3/2011	5:53:53 AM	H2 valve closed
10/3/2011	5:53:53 AM	BCl3 valve closed
10/3/2011	5:53:53 AM	PH3 valve closed
10/3/2011	5:53:53 AM	SiCl4 pre valve closed
10/3/2011	5:53:53 AM	SiCl4 post valve closed
10/3/2011	5:53:53 AM	Bypass valve closed
10/3/2011	5:53:53 AM	Bubbler valve closed
10/3/2011	5:53:53 AM	Main Vac valve opened
10/3/2011	5:53:53 AM	Helium MFC set to  0.000000
10/3/2011	5:53:53 AM	H2 MFC set to  0.000000
10/3/2011	5:53:53 AM	BCl3 MFC set to  0.000000
10/3/2011	5:53:53 AM	PHl3 MFC set to  0.000000
10/3/2011	5:53:53 AM	SiCl4 MFC set to  0.000000
10/3/2011	5:53:53 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	5:53:53 AM	Tube furnace set to 0
10/3/2011	5:54:24 AM	H2 valve closed
10/3/2011	5:54:24 AM	BCl3 valve closed
10/3/2011	5:54:24 AM	PH3 valve closed
10/3/2011	5:54:24 AM	SiCl4 pre valve closed
10/3/2011	5:54:24 AM	SiCl4 post valve closed
10/3/2011	5:54:24 AM	Bypass valve closed
10/3/2011	5:54:24 AM	Bubbler valve closed
10/3/2011	5:54:24 AM	Helium valve opened
10/3/2011	5:54:24 AM	Main Vac valve opened
10/3/2011	5:54:24 AM	Helium MFC set to  20.000000
10/3/2011	5:54:24 AM	H2 MFC set to  0.000000
10/3/2011	5:54:24 AM	BCl3 MFC set to  0.000000
10/3/2011	5:54:24 AM	PHl3 MFC set to  0.000000
10/3/2011	5:54:24 AM	SiCl4 MFC set to  0.000000
10/3/2011	5:54:24 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	5:54:24 AM	Tube furnace set to 0
10/3/2011	5:54:54 AM	Helium valve closed
10/3/2011	5:54:54 AM	H2 valve closed
10/3/2011	5:54:54 AM	BCl3 valve closed
10/3/2011	5:54:54 AM	PH3 valve closed
10/3/2011	5:54:54 AM	SiCl4 pre valve closed
10/3/2011	5:54:54 AM	SiCl4 post valve closed
10/3/2011	5:54:54 AM	Bypass valve closed
10/3/2011	5:54:54 AM	Bubbler valve closed
10/3/2011	5:54:54 AM	Main Vac valve opened
10/3/2011	5:54:54 AM	Helium MFC set to  0.000000
10/3/2011	5:54:54 AM	H2 MFC set to  0.000000
10/3/2011	5:54:54 AM	BCl3 MFC set to  0.000000
10/3/2011	5:54:54 AM	PHl3 MFC set to  0.000000
10/3/2011	5:54:54 AM	SiCl4 MFC set to  0.000000
10/3/2011	5:54:54 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	5:54:54 AM	Tube furnace set to 0
10/3/2011	5:55:24 AM	H2 valve closed
10/3/2011	5:55:24 AM	BCl3 valve closed
10/3/2011	5:55:24 AM	PH3 valve closed
10/3/2011	5:55:24 AM	SiCl4 pre valve closed
10/3/2011	5:55:24 AM	SiCl4 post valve closed
10/3/2011	5:55:24 AM	Bypass valve closed
10/3/2011	5:55:24 AM	Bubbler valve closed
10/3/2011	5:55:24 AM	Helium valve opened
10/3/2011	5:55:24 AM	Main Vac valve opened
10/3/2011	5:55:24 AM	Helium MFC set to  20.000000
10/3/2011	5:55:24 AM	H2 MFC set to  0.000000
10/3/2011	5:55:24 AM	BCl3 MFC set to  0.000000
10/3/2011	5:55:24 AM	PHl3 MFC set to  0.000000
10/3/2011	5:55:24 AM	SiCl4 MFC set to  0.000000
10/3/2011	5:55:24 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	5:55:24 AM	Tube furnace set to 0
10/3/2011	5:55:54 AM	Helium valve closed
10/3/2011	5:55:54 AM	H2 valve closed
10/3/2011	5:55:54 AM	BCl3 valve closed
10/3/2011	5:55:54 AM	PH3 valve closed
10/3/2011	5:55:54 AM	SiCl4 pre valve closed
10/3/2011	5:55:54 AM	SiCl4 post valve closed
10/3/2011	5:55:54 AM	Bypass valve closed
10/3/2011	5:55:54 AM	Bubbler valve closed
10/3/2011	5:55:54 AM	Main Vac valve opened
10/3/2011	5:55:54 AM	Helium MFC set to  0.000000
10/3/2011	5:55:54 AM	H2 MFC set to  0.000000
10/3/2011	5:55:54 AM	BCl3 MFC set to  0.000000
10/3/2011	5:55:54 AM	PHl3 MFC set to  0.000000
10/3/2011	5:55:54 AM	SiCl4 MFC set to  0.000000
10/3/2011	5:55:54 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	5:55:54 AM	Tube furnace set to 0
10/3/2011	5:56:07 AM	Run aborted at 5:56 AM
10/3/2011	5:56:07 AM	Helium valve closed
10/3/2011	5:56:07 AM	H2 valve closed
10/3/2011	5:56:07 AM	BCl3 valve closed
10/3/2011	5:56:07 AM	PH3 valve closed
10/3/2011	5:56:07 AM	SiCl4 pre valve closed
10/3/2011	5:56:07 AM	SiCl4 post valve closed
10/3/2011	5:56:07 AM	Bypass valve closed
10/3/2011	5:56:07 AM	Main Vac valve closed
10/3/2011	5:56:07 AM	Bubbler valve closed
10/3/2011	5:56:07 AM	Helium MFC set to  0.000000
10/3/2011	5:56:07 AM	H2 MFC set to  0.000000
10/3/2011	5:56:07 AM	BCl3 MFC set to  0.000000
10/3/2011	5:56:07 AM	PHl3 MFC set to  0.000000
10/3/2011	5:56:07 AM	SiCl4 MFC set to  0.000000
10/3/2011	5:56:07 AM	Tube furnace set to 0
10/3/2011	5:56:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/3/2011	5:56:10 AM	Main Vac valve opened
10/3/2011	5:58:58 AM	Recipe started at 5:58 AM
10/3/2011	5:58:58 AM	Helium valve closed
10/3/2011	5:58:58 AM	H2 valve closed
10/3/2011	5:58:58 AM	BCl3 valve closed
10/3/2011	5:58:58 AM	PH3 valve closed
10/3/2011	5:58:58 AM	SiCl4 pre valve closed
10/3/2011	5:58:58 AM	SiCl4 post valve closed
10/3/2011	5:58:58 AM	Bypass valve closed
10/3/2011	5:58:58 AM	Bubbler valve closed
10/3/2011	5:58:58 AM	Main Vac valve opened
10/3/2011	5:58:58 AM	Helium MFC set to  0.000000
10/3/2011	5:58:58 AM	H2 MFC set to  0.000000
10/3/2011	5:58:58 AM	BCl3 MFC set to  0.000000
10/3/2011	5:58:58 AM	PHl3 MFC set to  0.000000
10/3/2011	5:58:58 AM	SiCl4 MFC set to  0.000000
10/3/2011	5:58:58 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	5:58:59 AM	Tube furnace set to 180
10/3/2011	6:58:58 AM	H2 valve closed
10/3/2011	6:58:58 AM	BCl3 valve closed
10/3/2011	6:58:58 AM	PH3 valve closed
10/3/2011	6:58:59 AM	SiCl4 pre valve closed
10/3/2011	6:58:59 AM	SiCl4 post valve closed
10/3/2011	6:58:59 AM	Bypass valve closed
10/3/2011	6:58:59 AM	Bubbler valve closed
10/3/2011	6:58:59 AM	Helium valve opened
10/3/2011	6:58:59 AM	Main Vac valve opened
10/3/2011	6:58:59 AM	Helium MFC set to  10.000000
10/3/2011	6:58:59 AM	H2 MFC set to  0.000000
10/3/2011	6:58:59 AM	BCl3 MFC set to  0.000000
10/3/2011	6:58:59 AM	PHl3 MFC set to  0.000000
10/3/2011	6:58:59 AM	SiCl4 MFC set to  0.000000
10/3/2011	6:58:59 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	6:58:59 AM	Tube furnace set to 180
10/3/2011	6:59:29 AM	Helium valve closed
10/3/2011	6:59:29 AM	H2 valve closed
10/3/2011	6:59:29 AM	BCl3 valve closed
10/3/2011	6:59:29 AM	PH3 valve closed
10/3/2011	6:59:29 AM	SiCl4 pre valve closed
10/3/2011	6:59:29 AM	SiCl4 post valve closed
10/3/2011	6:59:29 AM	Bypass valve closed
10/3/2011	6:59:29 AM	Bubbler valve closed
10/3/2011	6:59:29 AM	Main Vac valve opened
10/3/2011	6:59:29 AM	Helium MFC set to  0.000000
10/3/2011	6:59:29 AM	H2 MFC set to  0.000000
10/3/2011	6:59:29 AM	BCl3 MFC set to  0.000000
10/3/2011	6:59:29 AM	PHl3 MFC set to  0.000000
10/3/2011	6:59:29 AM	SiCl4 MFC set to  0.000000
10/3/2011	6:59:29 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	6:59:29 AM	Tube furnace set to 180
10/3/2011	6:59:59 AM	H2 valve closed
10/3/2011	6:59:59 AM	BCl3 valve closed
10/3/2011	6:59:59 AM	PH3 valve closed
10/3/2011	6:59:59 AM	SiCl4 pre valve closed
10/3/2011	6:59:59 AM	SiCl4 post valve closed
10/3/2011	6:59:59 AM	Bypass valve closed
10/3/2011	6:59:59 AM	Bubbler valve closed
10/3/2011	6:59:59 AM	Helium valve opened
10/3/2011	6:59:59 AM	Main Vac valve opened
10/3/2011	6:59:59 AM	Helium MFC set to  10.000000
10/3/2011	6:59:59 AM	H2 MFC set to  0.000000
10/3/2011	6:59:59 AM	BCl3 MFC set to  0.000000
10/3/2011	6:59:59 AM	PHl3 MFC set to  0.000000
10/3/2011	6:59:59 AM	SiCl4 MFC set to  0.000000
10/3/2011	6:59:59 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	6:59:59 AM	Tube furnace set to 180
10/3/2011	7:00:29 AM	Helium valve closed
10/3/2011	7:00:29 AM	H2 valve closed
10/3/2011	7:00:29 AM	BCl3 valve closed
10/3/2011	7:00:29 AM	PH3 valve closed
10/3/2011	7:00:29 AM	SiCl4 pre valve closed
10/3/2011	7:00:29 AM	SiCl4 post valve closed
10/3/2011	7:00:29 AM	Bypass valve closed
10/3/2011	7:00:29 AM	Bubbler valve closed
10/3/2011	7:00:29 AM	Main Vac valve opened
10/3/2011	7:00:29 AM	Helium MFC set to  0.000000
10/3/2011	7:00:29 AM	H2 MFC set to  0.000000
10/3/2011	7:00:29 AM	BCl3 MFC set to  0.000000
10/3/2011	7:00:29 AM	PHl3 MFC set to  0.000000
10/3/2011	7:00:29 AM	SiCl4 MFC set to  0.000000
10/3/2011	7:00:29 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	7:00:29 AM	Tube furnace set to 180
10/3/2011	7:02:29 AM	Helium valve closed
10/3/2011	7:02:29 AM	BCl3 valve closed
10/3/2011	7:02:29 AM	PH3 valve closed
10/3/2011	7:02:29 AM	SiCl4 pre valve closed
10/3/2011	7:02:29 AM	SiCl4 post valve closed
10/3/2011	7:02:29 AM	Main Vac valve closed
10/3/2011	7:02:29 AM	Bypass valve closed
10/3/2011	7:02:29 AM	Bubbler valve closed
10/3/2011	7:02:29 AM	H2 valve opened
10/3/2011	7:02:29 AM	Helium MFC set to  0.000000
10/3/2011	7:02:29 AM	H2 MFC set to  500.000000
10/3/2011	7:02:29 AM	BCl3 MFC set to  0.000000
10/3/2011	7:02:29 AM	PHl3 MFC set to  0.000000
10/3/2011	7:02:29 AM	SiCl4 MFC set to  0.000000
10/3/2011	7:02:29 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	7:02:29 AM	Tube furnace set to 1000
10/3/2011	7:03:33 AM	Helium valve closed
10/3/2011	7:03:33 AM	BCl3 valve closed
10/3/2011	7:03:33 AM	PH3 valve closed
10/3/2011	7:03:33 AM	SiCl4 pre valve closed
10/3/2011	7:03:33 AM	SiCl4 post valve closed
10/3/2011	7:03:33 AM	Main Vac valve closed
10/3/2011	7:03:33 AM	Bypass valve closed
10/3/2011	7:03:33 AM	H2 valve opened
10/3/2011	7:03:33 AM	Bubbler valve opened
10/3/2011	7:03:33 AM	Helium MFC set to  0.000000
10/3/2011	7:03:33 AM	H2 MFC set to  500.000000
10/3/2011	7:03:33 AM	BCl3 MFC set to  0.000000
10/3/2011	7:03:33 AM	PHl3 MFC set to  0.000000
10/3/2011	7:03:33 AM	SiCl4 MFC set to  0.000000
10/3/2011	7:03:33 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	7:03:33 AM	Tube furnace set to 1000
10/3/2011	7:03:34 AM	Helium valve closed
10/3/2011	7:03:34 AM	BCl3 valve closed
10/3/2011	7:03:34 AM	PH3 valve closed
10/3/2011	7:03:34 AM	SiCl4 pre valve closed
10/3/2011	7:03:34 AM	SiCl4 post valve closed
10/3/2011	7:03:34 AM	Main Vac valve closed
10/3/2011	7:03:34 AM	Bypass valve closed
10/3/2011	7:03:34 AM	H2 valve opened
10/3/2011	7:03:34 AM	Bubbler valve opened
10/3/2011	7:03:34 AM	Helium MFC set to  0.000000
10/3/2011	7:03:34 AM	H2 MFC set to  500.000000
10/3/2011	7:03:34 AM	BCl3 MFC set to  0.000000
10/3/2011	7:03:34 AM	PHl3 MFC set to  0.000000
10/3/2011	7:03:34 AM	SiCl4 MFC set to  0.000000
10/3/2011	7:03:35 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	7:03:35 AM	Tube furnace set to 1000
10/3/2011	7:23:35 AM	Helium valve closed
10/3/2011	7:23:35 AM	PH3 valve closed
10/3/2011	7:23:35 AM	Main Vac valve closed
10/3/2011	7:23:35 AM	Bypass valve closed
10/3/2011	7:23:35 AM	H2 valve opened
10/3/2011	7:23:35 AM	BCl3 valve opened
10/3/2011	7:23:35 AM	SiCl4 pre valve opened
10/3/2011	7:23:35 AM	SiCl4 post valve opened
10/3/2011	7:23:35 AM	Bubbler valve opened
10/3/2011	7:23:35 AM	Helium MFC set to  0.000000
10/3/2011	7:23:35 AM	H2 MFC set to  500.000000
10/3/2011	7:23:35 AM	BCl3 MFC set to  2.000000
10/3/2011	7:23:35 AM	PHl3 MFC set to  0.000000
10/3/2011	7:23:35 AM	SiCl4 MFC set to  50.000000
10/3/2011	7:23:35 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	7:23:35 AM	Tube furnace set to 1000
10/3/2011	7:39:35 AM	Helium valve closed
10/3/2011	7:39:35 AM	BCl3 valve closed
10/3/2011	7:39:35 AM	PH3 valve closed
10/3/2011	7:39:35 AM	SiCl4 pre valve closed
10/3/2011	7:39:35 AM	SiCl4 post valve closed
10/3/2011	7:39:35 AM	Main Vac valve closed
10/3/2011	7:39:35 AM	Bypass valve closed
10/3/2011	7:39:35 AM	H2 valve opened
10/3/2011	7:39:35 AM	Bubbler valve opened
10/3/2011	7:39:35 AM	Helium MFC set to  0.000000
10/3/2011	7:39:35 AM	H2 MFC set to  500.000000
10/3/2011	7:39:35 AM	BCl3 MFC set to  0.000000
10/3/2011	7:39:35 AM	PHl3 MFC set to  0.000000
10/3/2011	7:39:35 AM	SiCl4 MFC set to  0.000000
10/3/2011	7:39:35 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	7:39:35 AM	Tube furnace set to 975
10/3/2011	7:41:05 AM	Helium valve closed
10/3/2011	7:41:05 AM	BCl3 valve closed
10/3/2011	7:41:05 AM	PH3 valve closed
10/3/2011	7:41:05 AM	SiCl4 pre valve closed
10/3/2011	7:41:05 AM	SiCl4 post valve closed
10/3/2011	7:41:05 AM	Main Vac valve closed
10/3/2011	7:41:05 AM	Bypass valve closed
10/3/2011	7:41:05 AM	H2 valve opened
10/3/2011	7:41:05 AM	Bubbler valve opened
10/3/2011	7:41:05 AM	Helium MFC set to  0.000000
10/3/2011	7:41:05 AM	H2 MFC set to  500.000000
10/3/2011	7:41:05 AM	BCl3 MFC set to  0.000000
10/3/2011	7:41:05 AM	PHl3 MFC set to  0.000000
10/3/2011	7:41:05 AM	SiCl4 MFC set to  0.000000
10/3/2011	7:41:05 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	7:41:05 AM	Tube furnace set to 950
10/3/2011	7:42:35 AM	Helium valve closed
10/3/2011	7:42:35 AM	BCl3 valve closed
10/3/2011	7:42:35 AM	PH3 valve closed
10/3/2011	7:42:35 AM	SiCl4 pre valve closed
10/3/2011	7:42:35 AM	SiCl4 post valve closed
10/3/2011	7:42:35 AM	Main Vac valve closed
10/3/2011	7:42:35 AM	Bypass valve closed
10/3/2011	7:42:35 AM	H2 valve opened
10/3/2011	7:42:35 AM	Bubbler valve opened
10/3/2011	7:42:35 AM	Helium MFC set to  0.000000
10/3/2011	7:42:35 AM	H2 MFC set to  500.000000
10/3/2011	7:42:35 AM	BCl3 MFC set to  0.000000
10/3/2011	7:42:35 AM	PHl3 MFC set to  0.000000
10/3/2011	7:42:35 AM	SiCl4 MFC set to  0.000000
10/3/2011	7:42:35 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	7:42:35 AM	Tube furnace set to 925
10/3/2011	7:44:05 AM	Helium valve closed
10/3/2011	7:44:05 AM	BCl3 valve closed
10/3/2011	7:44:05 AM	PH3 valve closed
10/3/2011	7:44:05 AM	SiCl4 pre valve closed
10/3/2011	7:44:05 AM	SiCl4 post valve closed
10/3/2011	7:44:05 AM	Main Vac valve closed
10/3/2011	7:44:05 AM	Bypass valve closed
10/3/2011	7:44:05 AM	H2 valve opened
10/3/2011	7:44:05 AM	Bubbler valve opened
10/3/2011	7:44:05 AM	Helium MFC set to  0.000000
10/3/2011	7:44:05 AM	H2 MFC set to  500.000000
10/3/2011	7:44:05 AM	BCl3 MFC set to  0.000000
10/3/2011	7:44:05 AM	PHl3 MFC set to  0.000000
10/3/2011	7:44:05 AM	SiCl4 MFC set to  0.000000
10/3/2011	7:44:05 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	7:44:06 AM	Tube furnace set to 900
10/3/2011	7:45:36 AM	H2 valve closed
10/3/2011	7:45:36 AM	BCl3 valve closed
10/3/2011	7:45:36 AM	PH3 valve closed
10/3/2011	7:45:36 AM	SiCl4 pre valve closed
10/3/2011	7:45:36 AM	SiCl4 post valve closed
10/3/2011	7:45:36 AM	Main Vac valve closed
10/3/2011	7:45:36 AM	Bypass valve closed
10/3/2011	7:45:36 AM	Helium valve opened
10/3/2011	7:45:36 AM	Bubbler valve opened
10/3/2011	7:45:36 AM	Helium MFC set to  500.000000
10/3/2011	7:45:36 AM	H2 MFC set to  0.000000
10/3/2011	7:45:36 AM	BCl3 MFC set to  0.000000
10/3/2011	7:45:36 AM	PHl3 MFC set to  0.000000
10/3/2011	7:45:36 AM	SiCl4 MFC set to  0.000000
10/3/2011	7:45:36 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	7:45:36 AM	Tube furnace set to 875
10/3/2011	7:47:06 AM	H2 valve closed
10/3/2011	7:47:06 AM	BCl3 valve closed
10/3/2011	7:47:06 AM	PH3 valve closed
10/3/2011	7:47:06 AM	SiCl4 pre valve closed
10/3/2011	7:47:06 AM	SiCl4 post valve closed
10/3/2011	7:47:06 AM	Main Vac valve closed
10/3/2011	7:47:06 AM	Bypass valve closed
10/3/2011	7:47:06 AM	Helium valve opened
10/3/2011	7:47:06 AM	Bubbler valve opened
10/3/2011	7:47:06 AM	Helium MFC set to  500.000000
10/3/2011	7:47:06 AM	H2 MFC set to  0.000000
10/3/2011	7:47:06 AM	BCl3 MFC set to  0.000000
10/3/2011	7:47:06 AM	PHl3 MFC set to  0.000000
10/3/2011	7:47:06 AM	SiCl4 MFC set to  0.000000
10/3/2011	7:47:06 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	7:47:06 AM	Tube furnace set to 850
10/3/2011	7:48:36 AM	H2 valve closed
10/3/2011	7:48:36 AM	BCl3 valve closed
10/3/2011	7:48:36 AM	PH3 valve closed
10/3/2011	7:48:36 AM	SiCl4 pre valve closed
10/3/2011	7:48:36 AM	SiCl4 post valve closed
10/3/2011	7:48:36 AM	Main Vac valve closed
10/3/2011	7:48:36 AM	Bypass valve closed
10/3/2011	7:48:36 AM	Helium valve opened
10/3/2011	7:48:36 AM	Bubbler valve opened
10/3/2011	7:48:36 AM	Helium MFC set to  500.000000
10/3/2011	7:48:36 AM	H2 MFC set to  0.000000
10/3/2011	7:48:36 AM	BCl3 MFC set to  0.000000
10/3/2011	7:48:36 AM	PHl3 MFC set to  0.000000
10/3/2011	7:48:36 AM	SiCl4 MFC set to  0.000000
10/3/2011	7:48:36 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	7:48:36 AM	Tube furnace set to 825
10/3/2011	7:50:06 AM	H2 valve closed
10/3/2011	7:50:06 AM	BCl3 valve closed
10/3/2011	7:50:06 AM	PH3 valve closed
10/3/2011	7:50:06 AM	SiCl4 pre valve closed
10/3/2011	7:50:06 AM	SiCl4 post valve closed
10/3/2011	7:50:06 AM	Main Vac valve closed
10/3/2011	7:50:06 AM	Bypass valve closed
10/3/2011	7:50:06 AM	Helium valve opened
10/3/2011	7:50:06 AM	Bubbler valve opened
10/3/2011	7:50:06 AM	Helium MFC set to  500.000000
10/3/2011	7:50:06 AM	H2 MFC set to  0.000000
10/3/2011	7:50:06 AM	BCl3 MFC set to  0.000000
10/3/2011	7:50:06 AM	PHl3 MFC set to  0.000000
10/3/2011	7:50:06 AM	SiCl4 MFC set to  0.000000
10/3/2011	7:50:06 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	7:50:06 AM	Tube furnace set to 800
10/3/2011	7:51:36 AM	H2 valve closed
10/3/2011	7:51:36 AM	BCl3 valve closed
10/3/2011	7:51:36 AM	PH3 valve closed
10/3/2011	7:51:36 AM	SiCl4 pre valve closed
10/3/2011	7:51:36 AM	SiCl4 post valve closed
10/3/2011	7:51:36 AM	Main Vac valve closed
10/3/2011	7:51:36 AM	Bypass valve closed
10/3/2011	7:51:36 AM	Helium valve opened
10/3/2011	7:51:36 AM	Bubbler valve opened
10/3/2011	7:51:36 AM	Helium MFC set to  500.000000
10/3/2011	7:51:36 AM	H2 MFC set to  0.000000
10/3/2011	7:51:36 AM	BCl3 MFC set to  0.000000
10/3/2011	7:51:36 AM	PHl3 MFC set to  0.000000
10/3/2011	7:51:36 AM	SiCl4 MFC set to  0.000000
10/3/2011	7:51:36 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	7:51:37 AM	Tube furnace set to 0
10/3/2011	8:06:37 AM	Helium valve closed
10/3/2011	8:06:37 AM	H2 valve closed
10/3/2011	8:06:37 AM	BCl3 valve closed
10/3/2011	8:06:37 AM	PH3 valve closed
10/3/2011	8:06:37 AM	SiCl4 pre valve closed
10/3/2011	8:06:37 AM	SiCl4 post valve closed
10/3/2011	8:06:37 AM	Main Vac valve closed
10/3/2011	8:06:37 AM	Bypass valve closed
10/3/2011	8:06:37 AM	Bubbler valve closed
10/3/2011	8:06:37 AM	Helium MFC set to  0.000000
10/3/2011	8:06:37 AM	H2 MFC set to  0.000000
10/3/2011	8:06:37 AM	BCl3 MFC set to  0.000000
10/3/2011	8:06:37 AM	PHl3 MFC set to  0.000000
10/3/2011	8:06:37 AM	SiCl4 MFC set to  0.000000
10/3/2011	8:06:37 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	8:06:37 AM	Tube furnace set to 0
10/3/2011	8:31:56 AM	Run aborted at 8:31 AM
10/3/2011	8:31:56 AM	Helium valve closed
10/3/2011	8:31:56 AM	H2 valve closed
10/3/2011	8:31:56 AM	BCl3 valve closed
10/3/2011	8:31:56 AM	PH3 valve closed
10/3/2011	8:31:56 AM	SiCl4 pre valve closed
10/3/2011	8:31:56 AM	SiCl4 post valve closed
10/3/2011	8:31:56 AM	Bypass valve closed
10/3/2011	8:31:56 AM	Main Vac valve closed
10/3/2011	8:31:56 AM	Bubbler valve closed
10/3/2011	8:31:56 AM	Helium MFC set to  0.000000
10/3/2011	8:31:56 AM	H2 MFC set to  0.000000
10/3/2011	8:31:56 AM	BCl3 MFC set to  0.000000
10/3/2011	8:31:56 AM	PHl3 MFC set to  0.000000
10/3/2011	8:31:56 AM	SiCl4 MFC set to  0.000000
10/3/2011	8:31:56 AM	Tube furnace set to 0
10/3/2011	8:32:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/3/2011	8:32:09 AM	Recipe started at 8:32 AM
10/3/2011	8:32:09 AM	Helium valve closed
10/3/2011	8:32:09 AM	H2 valve closed
10/3/2011	8:32:09 AM	BCl3 valve closed
10/3/2011	8:32:09 AM	PH3 valve closed
10/3/2011	8:32:09 AM	SiCl4 pre valve closed
10/3/2011	8:32:09 AM	SiCl4 post valve closed
10/3/2011	8:32:09 AM	Main Vac valve closed
10/3/2011	8:32:09 AM	Bypass valve closed
10/3/2011	8:32:09 AM	Bubbler valve closed
10/3/2011	8:32:09 AM	Helium MFC set to  0.000000
10/3/2011	8:32:09 AM	H2 MFC set to  0.000000
10/3/2011	8:32:09 AM	BCl3 MFC set to  0.000000
10/3/2011	8:32:09 AM	PHl3 MFC set to  0.000000
10/3/2011	8:32:09 AM	SiCl4 MFC set to  0.000000
10/3/2011	8:32:09 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	8:32:09 AM	Tube furnace set to 0
10/3/2011	8:32:12 AM	H2 valve closed
10/3/2011	8:32:12 AM	BCl3 valve closed
10/3/2011	8:32:12 AM	PH3 valve closed
10/3/2011	8:32:12 AM	SiCl4 pre valve closed
10/3/2011	8:32:12 AM	SiCl4 post valve closed
10/3/2011	8:32:12 AM	Main Vac valve closed
10/3/2011	8:32:12 AM	Bypass valve closed
10/3/2011	8:32:12 AM	Bubbler valve closed
10/3/2011	8:32:12 AM	Helium valve opened
10/3/2011	8:32:12 AM	Helium MFC set to  500.000000
10/3/2011	8:32:12 AM	H2 MFC set to  0.000000
10/3/2011	8:32:12 AM	BCl3 MFC set to  0.000000
10/3/2011	8:32:12 AM	PHl3 MFC set to  0.000000
10/3/2011	8:32:12 AM	SiCl4 MFC set to  0.000000
10/3/2011	8:32:12 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	8:32:12 AM	Tube furnace set to 0
10/3/2011	8:32:13 AM	Helium valve closed
10/3/2011	8:32:13 AM	H2 valve closed
10/3/2011	8:32:13 AM	BCl3 valve closed
10/3/2011	8:32:13 AM	PH3 valve closed
10/3/2011	8:32:13 AM	SiCl4 pre valve closed
10/3/2011	8:32:13 AM	SiCl4 post valve closed
10/3/2011	8:32:13 AM	Main Vac valve closed
10/3/2011	8:32:13 AM	Bypass valve closed
10/3/2011	8:32:13 AM	Bubbler valve closed
10/3/2011	8:32:13 AM	Helium MFC set to  0.000000
10/3/2011	8:32:13 AM	H2 MFC set to  0.000000
10/3/2011	8:32:13 AM	BCl3 MFC set to  0.000000
10/3/2011	8:32:13 AM	PHl3 MFC set to  0.000000
10/3/2011	8:32:13 AM	SiCl4 MFC set to  0.000000
10/3/2011	8:32:13 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	8:32:13 AM	Tube furnace set to 0
10/3/2011	8:32:14 AM	Run finished at 8:32 AM
10/3/2011	8:32:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/3/2011	8:34:55 AM	Tube furnace set to 190
10/3/2011	8:35:05 AM	Tube furnace set to 0
10/3/2011	8:35:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/3/2011	8:35:20 AM	Recipe started at 8:35 AM
10/3/2011	8:35:20 AM	Helium valve closed
10/3/2011	8:35:20 AM	H2 valve closed
10/3/2011	8:35:20 AM	BCl3 valve closed
10/3/2011	8:35:20 AM	PH3 valve closed
10/3/2011	8:35:20 AM	SiCl4 pre valve closed
10/3/2011	8:35:20 AM	SiCl4 post valve closed
10/3/2011	8:35:20 AM	Main Vac valve closed
10/3/2011	8:35:20 AM	Bypass valve closed
10/3/2011	8:35:20 AM	Bubbler valve closed
10/3/2011	8:35:20 AM	Helium MFC set to  0.000000
10/3/2011	8:35:20 AM	H2 MFC set to  0.000000
10/3/2011	8:35:20 AM	BCl3 MFC set to  0.000000
10/3/2011	8:35:20 AM	PHl3 MFC set to  0.000000
10/3/2011	8:35:20 AM	SiCl4 MFC set to  0.000000
10/3/2011	8:35:20 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	8:35:20 AM	Tube furnace set to 0
10/3/2011	8:35:23 AM	H2 valve closed
10/3/2011	8:35:23 AM	BCl3 valve closed
10/3/2011	8:35:23 AM	PH3 valve closed
10/3/2011	8:35:23 AM	SiCl4 pre valve closed
10/3/2011	8:35:23 AM	SiCl4 post valve closed
10/3/2011	8:35:23 AM	Main Vac valve closed
10/3/2011	8:35:23 AM	Bypass valve closed
10/3/2011	8:35:23 AM	Bubbler valve closed
10/3/2011	8:35:23 AM	Helium valve opened
10/3/2011	8:35:23 AM	Helium MFC set to  500.000000
10/3/2011	8:35:23 AM	H2 MFC set to  0.000000
10/3/2011	8:35:23 AM	BCl3 MFC set to  0.000000
10/3/2011	8:35:23 AM	PHl3 MFC set to  0.000000
10/3/2011	8:35:23 AM	SiCl4 MFC set to  0.000000
10/3/2011	8:35:23 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	8:35:23 AM	Tube furnace set to 0
10/3/2011	8:35:26 AM	Helium valve closed
10/3/2011	8:35:26 AM	H2 valve closed
10/3/2011	8:35:26 AM	BCl3 valve closed
10/3/2011	8:35:26 AM	PH3 valve closed
10/3/2011	8:35:26 AM	SiCl4 pre valve closed
10/3/2011	8:35:26 AM	SiCl4 post valve closed
10/3/2011	8:35:26 AM	Main Vac valve closed
10/3/2011	8:35:26 AM	Bypass valve closed
10/3/2011	8:35:26 AM	Bubbler valve closed
10/3/2011	8:35:26 AM	Helium MFC set to  0.000000
10/3/2011	8:35:26 AM	H2 MFC set to  0.000000
10/3/2011	8:35:26 AM	BCl3 MFC set to  0.000000
10/3/2011	8:35:26 AM	PHl3 MFC set to  0.000000
10/3/2011	8:35:26 AM	SiCl4 MFC set to  0.000000
10/3/2011	8:35:26 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	8:35:26 AM	Tube furnace set to 0
10/3/2011	8:35:27 AM	Run finished at 8:35 AM
10/3/2011	8:35:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/3/2011	8:51:52 AM	Tube furnace set to 200
10/3/2011	8:51:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/3/2011	8:51:54 AM	Recipe started at 8:51 AM
10/3/2011	8:51:54 AM	Helium valve closed
10/3/2011	8:51:54 AM	H2 valve closed
10/3/2011	8:51:54 AM	BCl3 valve closed
10/3/2011	8:51:54 AM	PH3 valve closed
10/3/2011	8:51:54 AM	SiCl4 pre valve closed
10/3/2011	8:51:54 AM	SiCl4 post valve closed
10/3/2011	8:51:54 AM	Main Vac valve closed
10/3/2011	8:51:54 AM	Bypass valve closed
10/3/2011	8:51:54 AM	Bubbler valve closed
10/3/2011	8:51:54 AM	Helium MFC set to  0.000000
10/3/2011	8:51:54 AM	H2 MFC set to  0.000000
10/3/2011	8:51:54 AM	BCl3 MFC set to  0.000000
10/3/2011	8:51:54 AM	PHl3 MFC set to  0.000000
10/3/2011	8:51:54 AM	SiCl4 MFC set to  0.000000
10/3/2011	8:51:54 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	8:51:54 AM	Tube furnace set to 0
10/3/2011	8:51:57 AM	H2 valve closed
10/3/2011	8:51:57 AM	BCl3 valve closed
10/3/2011	8:51:57 AM	PH3 valve closed
10/3/2011	8:51:57 AM	SiCl4 pre valve closed
10/3/2011	8:51:57 AM	SiCl4 post valve closed
10/3/2011	8:51:57 AM	Main Vac valve closed
10/3/2011	8:51:57 AM	Bypass valve closed
10/3/2011	8:51:57 AM	Bubbler valve closed
10/3/2011	8:51:57 AM	Helium valve opened
10/3/2011	8:51:57 AM	Helium MFC set to  500.000000
10/3/2011	8:51:57 AM	H2 MFC set to  0.000000
10/3/2011	8:51:57 AM	BCl3 MFC set to  0.000000
10/3/2011	8:51:57 AM	PHl3 MFC set to  0.000000
10/3/2011	8:51:57 AM	SiCl4 MFC set to  0.000000
10/3/2011	8:51:57 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	8:51:57 AM	Tube furnace set to 0
10/3/2011	8:52:01 AM	Helium valve closed
10/3/2011	8:52:01 AM	H2 valve closed
10/3/2011	8:52:01 AM	BCl3 valve closed
10/3/2011	8:52:01 AM	PH3 valve closed
10/3/2011	8:52:01 AM	SiCl4 pre valve closed
10/3/2011	8:52:01 AM	SiCl4 post valve closed
10/3/2011	8:52:01 AM	Main Vac valve closed
10/3/2011	8:52:01 AM	Bypass valve closed
10/3/2011	8:52:01 AM	Bubbler valve closed
10/3/2011	8:52:01 AM	Helium MFC set to  0.000000
10/3/2011	8:52:01 AM	H2 MFC set to  0.000000
10/3/2011	8:52:01 AM	BCl3 MFC set to  0.000000
10/3/2011	8:52:01 AM	PHl3 MFC set to  0.000000
10/3/2011	8:52:01 AM	SiCl4 MFC set to  0.000000
10/3/2011	8:52:01 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	8:52:01 AM	Tube furnace set to 0
10/3/2011	8:52:02 AM	Run finished at 8:52 AM
10/3/2011	8:52:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/3/2011	8:52:07 AM	Tube furnace set to 200
10/3/2011	8:54:58 AM	Helium MFC set to  500.000000
10/3/2011	8:55:01 AM	Helium valve opened
10/3/2011	8:56:41 AM	Helium valve closed
10/3/2011	8:56:55 AM	Helium valve opened
10/3/2011	9:00:16 AM	Helium valve closed
10/3/2011	9:00:48 AM	Helium MFC set to  0.000000
10/3/2011	9:00:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/3/2011	9:01:10 AM	Recipe started at 9:01 AM
10/3/2011	9:01:10 AM	Helium valve closed
10/3/2011	9:01:10 AM	H2 valve closed
10/3/2011	9:01:10 AM	BCl3 valve closed
10/3/2011	9:01:10 AM	PH3 valve closed
10/3/2011	9:01:10 AM	SiCl4 pre valve closed
10/3/2011	9:01:10 AM	SiCl4 post valve closed
10/3/2011	9:01:10 AM	Main Vac valve closed
10/3/2011	9:01:10 AM	Bubbler valve closed
10/3/2011	9:01:10 AM	Bypass valve opened
10/3/2011	9:01:10 AM	Helium MFC set to  0.000000
10/3/2011	9:01:10 AM	H2 MFC set to  0.000000
10/3/2011	9:01:10 AM	BCl3 MFC set to  0.000000
10/3/2011	9:01:10 AM	PHl3 MFC set to  0.000000
10/3/2011	9:01:10 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:01:10 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:01:10 AM	Tube furnace set to 0
10/3/2011	9:02:11 AM	Helium valve closed
10/3/2011	9:02:11 AM	H2 valve closed
10/3/2011	9:02:11 AM	BCl3 valve closed
10/3/2011	9:02:11 AM	PH3 valve closed
10/3/2011	9:02:11 AM	SiCl4 pre valve closed
10/3/2011	9:02:11 AM	SiCl4 post valve closed
10/3/2011	9:02:11 AM	Main Vac valve closed
10/3/2011	9:02:11 AM	Bubbler valve closed
10/3/2011	9:02:11 AM	Bypass valve opened
10/3/2011	9:02:11 AM	Helium MFC set to  0.000000
10/3/2011	9:02:11 AM	H2 MFC set to  0.000000
10/3/2011	9:02:11 AM	BCl3 MFC set to  0.000000
10/3/2011	9:02:11 AM	PHl3 MFC set to  0.000000
10/3/2011	9:02:11 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:02:11 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:02:11 AM	Tube furnace set to 0
10/3/2011	9:02:41 AM	Helium valve closed
10/3/2011	9:02:41 AM	H2 valve closed
10/3/2011	9:02:41 AM	BCl3 valve closed
10/3/2011	9:02:41 AM	PH3 valve closed
10/3/2011	9:02:41 AM	SiCl4 pre valve closed
10/3/2011	9:02:41 AM	SiCl4 post valve closed
10/3/2011	9:02:41 AM	Bypass valve closed
10/3/2011	9:02:41 AM	Bubbler valve closed
10/3/2011	9:02:41 AM	Main Vac valve opened
10/3/2011	9:02:41 AM	Helium MFC set to  0.000000
10/3/2011	9:02:41 AM	H2 MFC set to  0.000000
10/3/2011	9:02:41 AM	BCl3 MFC set to  0.000000
10/3/2011	9:02:41 AM	PHl3 MFC set to  0.000000
10/3/2011	9:02:41 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:02:41 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:02:41 AM	Tube furnace set to 0
10/3/2011	9:03:11 AM	H2 valve closed
10/3/2011	9:03:11 AM	BCl3 valve closed
10/3/2011	9:03:11 AM	PH3 valve closed
10/3/2011	9:03:11 AM	SiCl4 pre valve closed
10/3/2011	9:03:11 AM	SiCl4 post valve closed
10/3/2011	9:03:11 AM	Bypass valve closed
10/3/2011	9:03:11 AM	Bubbler valve closed
10/3/2011	9:03:11 AM	Helium valve opened
10/3/2011	9:03:11 AM	Main Vac valve opened
10/3/2011	9:03:11 AM	Helium MFC set to  20.000000
10/3/2011	9:03:11 AM	H2 MFC set to  0.000000
10/3/2011	9:03:11 AM	BCl3 MFC set to  0.000000
10/3/2011	9:03:11 AM	PHl3 MFC set to  0.000000
10/3/2011	9:03:11 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:03:11 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:03:12 AM	Tube furnace set to 0
10/3/2011	9:03:42 AM	Helium valve closed
10/3/2011	9:03:42 AM	H2 valve closed
10/3/2011	9:03:42 AM	BCl3 valve closed
10/3/2011	9:03:42 AM	PH3 valve closed
10/3/2011	9:03:42 AM	SiCl4 pre valve closed
10/3/2011	9:03:42 AM	SiCl4 post valve closed
10/3/2011	9:03:42 AM	Bypass valve closed
10/3/2011	9:03:42 AM	Bubbler valve closed
10/3/2011	9:03:42 AM	Main Vac valve opened
10/3/2011	9:03:42 AM	Helium MFC set to  0.000000
10/3/2011	9:03:42 AM	H2 MFC set to  0.000000
10/3/2011	9:03:42 AM	BCl3 MFC set to  0.000000
10/3/2011	9:03:42 AM	PHl3 MFC set to  0.000000
10/3/2011	9:03:42 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:03:42 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:03:42 AM	Tube furnace set to 0
10/3/2011	9:04:12 AM	H2 valve closed
10/3/2011	9:04:12 AM	BCl3 valve closed
10/3/2011	9:04:12 AM	PH3 valve closed
10/3/2011	9:04:12 AM	SiCl4 pre valve closed
10/3/2011	9:04:12 AM	SiCl4 post valve closed
10/3/2011	9:04:12 AM	Bypass valve closed
10/3/2011	9:04:12 AM	Bubbler valve closed
10/3/2011	9:04:12 AM	Helium valve opened
10/3/2011	9:04:12 AM	Main Vac valve opened
10/3/2011	9:04:12 AM	Helium MFC set to  20.000000
10/3/2011	9:04:12 AM	H2 MFC set to  0.000000
10/3/2011	9:04:12 AM	BCl3 MFC set to  0.000000
10/3/2011	9:04:12 AM	PHl3 MFC set to  0.000000
10/3/2011	9:04:12 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:04:12 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:04:12 AM	Tube furnace set to 0
10/3/2011	9:04:42 AM	Helium valve closed
10/3/2011	9:04:42 AM	H2 valve closed
10/3/2011	9:04:42 AM	BCl3 valve closed
10/3/2011	9:04:42 AM	PH3 valve closed
10/3/2011	9:04:42 AM	SiCl4 pre valve closed
10/3/2011	9:04:42 AM	SiCl4 post valve closed
10/3/2011	9:04:42 AM	Bypass valve closed
10/3/2011	9:04:42 AM	Bubbler valve closed
10/3/2011	9:04:42 AM	Main Vac valve opened
10/3/2011	9:04:42 AM	Helium MFC set to  0.000000
10/3/2011	9:04:42 AM	H2 MFC set to  0.000000
10/3/2011	9:04:42 AM	BCl3 MFC set to  0.000000
10/3/2011	9:04:42 AM	PHl3 MFC set to  0.000000
10/3/2011	9:04:42 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:04:42 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:04:42 AM	Tube furnace set to 0
10/3/2011	9:05:12 AM	H2 valve closed
10/3/2011	9:05:12 AM	BCl3 valve closed
10/3/2011	9:05:12 AM	PH3 valve closed
10/3/2011	9:05:12 AM	SiCl4 pre valve closed
10/3/2011	9:05:12 AM	SiCl4 post valve closed
10/3/2011	9:05:12 AM	Bypass valve closed
10/3/2011	9:05:12 AM	Bubbler valve closed
10/3/2011	9:05:12 AM	Helium valve opened
10/3/2011	9:05:12 AM	Main Vac valve opened
10/3/2011	9:05:12 AM	Helium MFC set to  20.000000
10/3/2011	9:05:12 AM	H2 MFC set to  0.000000
10/3/2011	9:05:12 AM	BCl3 MFC set to  0.000000
10/3/2011	9:05:12 AM	PHl3 MFC set to  0.000000
10/3/2011	9:05:12 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:05:12 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:05:12 AM	Tube furnace set to 0
10/3/2011	9:05:42 AM	Helium valve closed
10/3/2011	9:05:42 AM	H2 valve closed
10/3/2011	9:05:42 AM	BCl3 valve closed
10/3/2011	9:05:42 AM	PH3 valve closed
10/3/2011	9:05:42 AM	SiCl4 pre valve closed
10/3/2011	9:05:42 AM	SiCl4 post valve closed
10/3/2011	9:05:43 AM	Bypass valve closed
10/3/2011	9:05:43 AM	Bubbler valve closed
10/3/2011	9:05:43 AM	Main Vac valve opened
10/3/2011	9:05:43 AM	Helium MFC set to  0.000000
10/3/2011	9:05:43 AM	H2 MFC set to  0.000000
10/3/2011	9:05:43 AM	BCl3 MFC set to  0.000000
10/3/2011	9:05:43 AM	PHl3 MFC set to  0.000000
10/3/2011	9:05:43 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:05:43 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:05:43 AM	Tube furnace set to 0
10/3/2011	9:06:13 AM	H2 valve closed
10/3/2011	9:06:13 AM	BCl3 valve closed
10/3/2011	9:06:13 AM	PH3 valve closed
10/3/2011	9:06:13 AM	SiCl4 pre valve closed
10/3/2011	9:06:13 AM	SiCl4 post valve closed
10/3/2011	9:06:13 AM	Bypass valve closed
10/3/2011	9:06:13 AM	Bubbler valve closed
10/3/2011	9:06:13 AM	Helium valve opened
10/3/2011	9:06:13 AM	Main Vac valve opened
10/3/2011	9:06:13 AM	Helium MFC set to  20.000000
10/3/2011	9:06:13 AM	H2 MFC set to  0.000000
10/3/2011	9:06:13 AM	BCl3 MFC set to  0.000000
10/3/2011	9:06:13 AM	PHl3 MFC set to  0.000000
10/3/2011	9:06:13 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:06:13 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:06:13 AM	Tube furnace set to 0
10/3/2011	9:06:43 AM	Helium valve closed
10/3/2011	9:06:43 AM	H2 valve closed
10/3/2011	9:06:43 AM	BCl3 valve closed
10/3/2011	9:06:43 AM	PH3 valve closed
10/3/2011	9:06:43 AM	SiCl4 pre valve closed
10/3/2011	9:06:43 AM	SiCl4 post valve closed
10/3/2011	9:06:43 AM	Bypass valve closed
10/3/2011	9:06:43 AM	Bubbler valve closed
10/3/2011	9:06:43 AM	Main Vac valve opened
10/3/2011	9:06:43 AM	Helium MFC set to  0.000000
10/3/2011	9:06:43 AM	H2 MFC set to  0.000000
10/3/2011	9:06:43 AM	BCl3 MFC set to  0.000000
10/3/2011	9:06:43 AM	PHl3 MFC set to  0.000000
10/3/2011	9:06:43 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:06:43 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:06:43 AM	Tube furnace set to 0
10/3/2011	9:07:13 AM	H2 valve closed
10/3/2011	9:07:13 AM	BCl3 valve closed
10/3/2011	9:07:13 AM	PH3 valve closed
10/3/2011	9:07:13 AM	SiCl4 pre valve closed
10/3/2011	9:07:13 AM	SiCl4 post valve closed
10/3/2011	9:07:13 AM	Bypass valve closed
10/3/2011	9:07:13 AM	Bubbler valve closed
10/3/2011	9:07:13 AM	Helium valve opened
10/3/2011	9:07:13 AM	Main Vac valve opened
10/3/2011	9:07:13 AM	Helium MFC set to  20.000000
10/3/2011	9:07:13 AM	H2 MFC set to  0.000000
10/3/2011	9:07:13 AM	BCl3 MFC set to  0.000000
10/3/2011	9:07:13 AM	PHl3 MFC set to  0.000000
10/3/2011	9:07:13 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:07:13 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:07:13 AM	Tube furnace set to 0
10/3/2011	9:07:43 AM	Helium valve closed
10/3/2011	9:07:43 AM	H2 valve closed
10/3/2011	9:07:43 AM	BCl3 valve closed
10/3/2011	9:07:43 AM	PH3 valve closed
10/3/2011	9:07:43 AM	SiCl4 pre valve closed
10/3/2011	9:07:43 AM	SiCl4 post valve closed
10/3/2011	9:07:43 AM	Bypass valve closed
10/3/2011	9:07:43 AM	Bubbler valve closed
10/3/2011	9:07:43 AM	Main Vac valve opened
10/3/2011	9:07:43 AM	Helium MFC set to  0.000000
10/3/2011	9:07:43 AM	H2 MFC set to  0.000000
10/3/2011	9:07:43 AM	BCl3 MFC set to  0.000000
10/3/2011	9:07:43 AM	PHl3 MFC set to  0.000000
10/3/2011	9:07:43 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:07:43 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:07:43 AM	Tube furnace set to 0
10/3/2011	9:08:14 AM	H2 valve closed
10/3/2011	9:08:14 AM	BCl3 valve closed
10/3/2011	9:08:14 AM	PH3 valve closed
10/3/2011	9:08:14 AM	SiCl4 pre valve closed
10/3/2011	9:08:14 AM	SiCl4 post valve closed
10/3/2011	9:08:14 AM	Bypass valve closed
10/3/2011	9:08:14 AM	Bubbler valve closed
10/3/2011	9:08:14 AM	Helium valve opened
10/3/2011	9:08:14 AM	Main Vac valve opened
10/3/2011	9:08:14 AM	Helium MFC set to  20.000000
10/3/2011	9:08:14 AM	H2 MFC set to  0.000000
10/3/2011	9:08:14 AM	BCl3 MFC set to  0.000000
10/3/2011	9:08:14 AM	PHl3 MFC set to  0.000000
10/3/2011	9:08:14 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:08:14 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:08:14 AM	Tube furnace set to 0
10/3/2011	9:08:44 AM	Helium valve closed
10/3/2011	9:08:44 AM	H2 valve closed
10/3/2011	9:08:44 AM	BCl3 valve closed
10/3/2011	9:08:44 AM	PH3 valve closed
10/3/2011	9:08:44 AM	SiCl4 pre valve closed
10/3/2011	9:08:44 AM	SiCl4 post valve closed
10/3/2011	9:08:44 AM	Bypass valve closed
10/3/2011	9:08:44 AM	Bubbler valve closed
10/3/2011	9:08:44 AM	Main Vac valve opened
10/3/2011	9:08:44 AM	Helium MFC set to  0.000000
10/3/2011	9:08:44 AM	H2 MFC set to  0.000000
10/3/2011	9:08:44 AM	BCl3 MFC set to  0.000000
10/3/2011	9:08:44 AM	PHl3 MFC set to  0.000000
10/3/2011	9:08:44 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:08:44 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:08:44 AM	Tube furnace set to 0
10/3/2011	9:09:14 AM	H2 valve closed
10/3/2011	9:09:14 AM	BCl3 valve closed
10/3/2011	9:09:14 AM	PH3 valve closed
10/3/2011	9:09:14 AM	SiCl4 pre valve closed
10/3/2011	9:09:14 AM	SiCl4 post valve closed
10/3/2011	9:09:14 AM	Bypass valve closed
10/3/2011	9:09:14 AM	Bubbler valve closed
10/3/2011	9:09:14 AM	Helium valve opened
10/3/2011	9:09:14 AM	Main Vac valve opened
10/3/2011	9:09:14 AM	Helium MFC set to  20.000000
10/3/2011	9:09:14 AM	H2 MFC set to  0.000000
10/3/2011	9:09:14 AM	BCl3 MFC set to  0.000000
10/3/2011	9:09:14 AM	PHl3 MFC set to  0.000000
10/3/2011	9:09:14 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:09:14 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:09:14 AM	Tube furnace set to 0
10/3/2011	9:09:44 AM	Helium valve closed
10/3/2011	9:09:44 AM	H2 valve closed
10/3/2011	9:09:44 AM	BCl3 valve closed
10/3/2011	9:09:44 AM	PH3 valve closed
10/3/2011	9:09:44 AM	SiCl4 pre valve closed
10/3/2011	9:09:44 AM	SiCl4 post valve closed
10/3/2011	9:09:44 AM	Bypass valve closed
10/3/2011	9:09:44 AM	Bubbler valve closed
10/3/2011	9:09:44 AM	Main Vac valve opened
10/3/2011	9:09:44 AM	Helium MFC set to  0.000000
10/3/2011	9:09:44 AM	H2 MFC set to  0.000000
10/3/2011	9:09:44 AM	BCl3 MFC set to  0.000000
10/3/2011	9:09:44 AM	PHl3 MFC set to  0.000000
10/3/2011	9:09:44 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:09:44 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:09:44 AM	Tube furnace set to 0
10/3/2011	9:10:14 AM	H2 valve closed
10/3/2011	9:10:14 AM	BCl3 valve closed
10/3/2011	9:10:14 AM	PH3 valve closed
10/3/2011	9:10:14 AM	SiCl4 pre valve closed
10/3/2011	9:10:14 AM	SiCl4 post valve closed
10/3/2011	9:10:14 AM	Bypass valve closed
10/3/2011	9:10:14 AM	Bubbler valve closed
10/3/2011	9:10:14 AM	Helium valve opened
10/3/2011	9:10:14 AM	Main Vac valve opened
10/3/2011	9:10:14 AM	Helium MFC set to  20.000000
10/3/2011	9:10:14 AM	H2 MFC set to  0.000000
10/3/2011	9:10:14 AM	BCl3 MFC set to  0.000000
10/3/2011	9:10:14 AM	PHl3 MFC set to  0.000000
10/3/2011	9:10:14 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:10:14 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:10:15 AM	Tube furnace set to 0
10/3/2011	9:10:45 AM	Helium valve closed
10/3/2011	9:10:45 AM	H2 valve closed
10/3/2011	9:10:45 AM	BCl3 valve closed
10/3/2011	9:10:45 AM	PH3 valve closed
10/3/2011	9:10:45 AM	SiCl4 pre valve closed
10/3/2011	9:10:45 AM	SiCl4 post valve closed
10/3/2011	9:10:45 AM	Bypass valve closed
10/3/2011	9:10:45 AM	Bubbler valve closed
10/3/2011	9:10:45 AM	Main Vac valve opened
10/3/2011	9:10:45 AM	Helium MFC set to  0.000000
10/3/2011	9:10:45 AM	H2 MFC set to  0.000000
10/3/2011	9:10:45 AM	BCl3 MFC set to  0.000000
10/3/2011	9:10:45 AM	PHl3 MFC set to  0.000000
10/3/2011	9:10:45 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:10:45 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:10:45 AM	Tube furnace set to 0
10/3/2011	9:11:15 AM	H2 valve closed
10/3/2011	9:11:15 AM	BCl3 valve closed
10/3/2011	9:11:15 AM	PH3 valve closed
10/3/2011	9:11:15 AM	SiCl4 pre valve closed
10/3/2011	9:11:15 AM	SiCl4 post valve closed
10/3/2011	9:11:15 AM	Bypass valve closed
10/3/2011	9:11:15 AM	Bubbler valve closed
10/3/2011	9:11:15 AM	Helium valve opened
10/3/2011	9:11:15 AM	Main Vac valve opened
10/3/2011	9:11:15 AM	Helium MFC set to  20.000000
10/3/2011	9:11:15 AM	H2 MFC set to  0.000000
10/3/2011	9:11:15 AM	BCl3 MFC set to  0.000000
10/3/2011	9:11:15 AM	PHl3 MFC set to  0.000000
10/3/2011	9:11:15 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:11:15 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:11:15 AM	Tube furnace set to 0
10/3/2011	9:11:45 AM	Helium valve closed
10/3/2011	9:11:45 AM	H2 valve closed
10/3/2011	9:11:45 AM	BCl3 valve closed
10/3/2011	9:11:45 AM	PH3 valve closed
10/3/2011	9:11:45 AM	SiCl4 pre valve closed
10/3/2011	9:11:45 AM	SiCl4 post valve closed
10/3/2011	9:11:45 AM	Bypass valve closed
10/3/2011	9:11:45 AM	Bubbler valve closed
10/3/2011	9:11:45 AM	Main Vac valve opened
10/3/2011	9:11:45 AM	Helium MFC set to  0.000000
10/3/2011	9:11:45 AM	H2 MFC set to  0.000000
10/3/2011	9:11:45 AM	BCl3 MFC set to  0.000000
10/3/2011	9:11:45 AM	PHl3 MFC set to  0.000000
10/3/2011	9:11:45 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:11:45 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:11:45 AM	Tube furnace set to 0
10/3/2011	9:12:15 AM	H2 valve closed
10/3/2011	9:12:15 AM	BCl3 valve closed
10/3/2011	9:12:15 AM	PH3 valve closed
10/3/2011	9:12:15 AM	SiCl4 pre valve closed
10/3/2011	9:12:15 AM	SiCl4 post valve closed
10/3/2011	9:12:15 AM	Bypass valve closed
10/3/2011	9:12:15 AM	Bubbler valve closed
10/3/2011	9:12:15 AM	Helium valve opened
10/3/2011	9:12:15 AM	Main Vac valve opened
10/3/2011	9:12:15 AM	Helium MFC set to  20.000000
10/3/2011	9:12:15 AM	H2 MFC set to  0.000000
10/3/2011	9:12:15 AM	BCl3 MFC set to  0.000000
10/3/2011	9:12:15 AM	PHl3 MFC set to  0.000000
10/3/2011	9:12:15 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:12:15 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:12:15 AM	Tube furnace set to 0
10/3/2011	9:12:45 AM	Helium valve closed
10/3/2011	9:12:45 AM	H2 valve closed
10/3/2011	9:12:45 AM	BCl3 valve closed
10/3/2011	9:12:45 AM	PH3 valve closed
10/3/2011	9:12:45 AM	SiCl4 pre valve closed
10/3/2011	9:12:45 AM	SiCl4 post valve closed
10/3/2011	9:12:45 AM	Bypass valve closed
10/3/2011	9:12:45 AM	Bubbler valve closed
10/3/2011	9:12:45 AM	Main Vac valve opened
10/3/2011	9:12:45 AM	Helium MFC set to  0.000000
10/3/2011	9:12:45 AM	H2 MFC set to  0.000000
10/3/2011	9:12:45 AM	BCl3 MFC set to  0.000000
10/3/2011	9:12:45 AM	PHl3 MFC set to  0.000000
10/3/2011	9:12:45 AM	SiCl4 MFC set to  0.000000
10/3/2011	9:12:45 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	9:12:46 AM	Tube furnace set to 0
10/3/2011	9:12:47 AM	Run finished at 9:12 AM
10/3/2011	9:12:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/3/2011	9:58:21 AM	Main Vac valve closed
10/3/2011	9:58:36 AM	Main Vac valve opened
10/3/2011	10:02:05 AM	Recipe started at 10:01 AM
10/3/2011	10:02:05 AM	H2 valve closed
10/3/2011	10:02:05 AM	BCl3 valve closed
10/3/2011	10:02:05 AM	PH3 valve closed
10/3/2011	10:02:05 AM	SiCl4 pre valve closed
10/3/2011	10:02:05 AM	SiCl4 post valve closed
10/3/2011	10:02:05 AM	Bypass valve closed
10/3/2011	10:02:05 AM	Bubbler valve closed
10/3/2011	10:02:05 AM	Helium valve opened
10/3/2011	10:02:05 AM	Main Vac valve opened
10/3/2011	10:02:05 AM	Helium MFC set to  10.000000
10/3/2011	10:02:05 AM	H2 MFC set to  0.000000
10/3/2011	10:02:05 AM	BCl3 MFC set to  0.000000
10/3/2011	10:02:05 AM	PHl3 MFC set to  0.000000
10/3/2011	10:02:05 AM	SiCl4 MFC set to  0.000000
10/3/2011	10:02:05 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	10:02:05 AM	Tube furnace set to 180
10/3/2011	10:02:35 AM	Helium valve closed
10/3/2011	10:02:35 AM	H2 valve closed
10/3/2011	10:02:35 AM	BCl3 valve closed
10/3/2011	10:02:35 AM	PH3 valve closed
10/3/2011	10:02:35 AM	SiCl4 pre valve closed
10/3/2011	10:02:35 AM	SiCl4 post valve closed
10/3/2011	10:02:35 AM	Bypass valve closed
10/3/2011	10:02:35 AM	Bubbler valve closed
10/3/2011	10:02:35 AM	Main Vac valve opened
10/3/2011	10:02:35 AM	Helium MFC set to  0.000000
10/3/2011	10:02:35 AM	H2 MFC set to  0.000000
10/3/2011	10:02:35 AM	BCl3 MFC set to  0.000000
10/3/2011	10:02:35 AM	PHl3 MFC set to  0.000000
10/3/2011	10:02:35 AM	SiCl4 MFC set to  0.000000
10/3/2011	10:02:35 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	10:02:35 AM	Tube furnace set to 180
10/3/2011	10:03:05 AM	H2 valve closed
10/3/2011	10:03:05 AM	BCl3 valve closed
10/3/2011	10:03:05 AM	PH3 valve closed
10/3/2011	10:03:05 AM	SiCl4 pre valve closed
10/3/2011	10:03:05 AM	SiCl4 post valve closed
10/3/2011	10:03:05 AM	Bypass valve closed
10/3/2011	10:03:05 AM	Bubbler valve closed
10/3/2011	10:03:05 AM	Helium valve opened
10/3/2011	10:03:05 AM	Main Vac valve opened
10/3/2011	10:03:05 AM	Helium MFC set to  10.000000
10/3/2011	10:03:05 AM	H2 MFC set to  0.000000
10/3/2011	10:03:05 AM	BCl3 MFC set to  0.000000
10/3/2011	10:03:05 AM	PHl3 MFC set to  0.000000
10/3/2011	10:03:05 AM	SiCl4 MFC set to  0.000000
10/3/2011	10:03:05 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	10:03:05 AM	Tube furnace set to 180
10/3/2011	10:03:36 AM	Helium valve closed
10/3/2011	10:03:36 AM	H2 valve closed
10/3/2011	10:03:36 AM	BCl3 valve closed
10/3/2011	10:03:36 AM	PH3 valve closed
10/3/2011	10:03:36 AM	SiCl4 pre valve closed
10/3/2011	10:03:36 AM	SiCl4 post valve closed
10/3/2011	10:03:36 AM	Bypass valve closed
10/3/2011	10:03:36 AM	Bubbler valve closed
10/3/2011	10:03:36 AM	Main Vac valve opened
10/3/2011	10:03:36 AM	Helium MFC set to  0.000000
10/3/2011	10:03:36 AM	H2 MFC set to  0.000000
10/3/2011	10:03:36 AM	BCl3 MFC set to  0.000000
10/3/2011	10:03:36 AM	PHl3 MFC set to  0.000000
10/3/2011	10:03:36 AM	SiCl4 MFC set to  0.000000
10/3/2011	10:03:36 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	10:03:36 AM	Tube furnace set to 180
10/3/2011	11:00:46 AM	Helium valve closed
10/3/2011	11:00:46 AM	H2 valve closed
10/3/2011	11:00:46 AM	BCl3 valve closed
10/3/2011	11:00:46 AM	PH3 valve closed
10/3/2011	11:00:46 AM	SiCl4 pre valve closed
10/3/2011	11:00:46 AM	SiCl4 post valve closed
10/3/2011	11:00:46 AM	Main Vac valve closed
10/3/2011	11:00:46 AM	Bypass valve closed
10/3/2011	11:00:46 AM	Bubbler valve closed
10/3/2011	11:00:46 AM	Helium MFC set to  0.000000
10/3/2011	11:00:46 AM	H2 MFC set to  0.000000
10/3/2011	11:00:46 AM	BCl3 MFC set to  0.000000
10/3/2011	11:00:46 AM	PHl3 MFC set to  0.000000
10/3/2011	11:00:46 AM	SiCl4 MFC set to  0.000000
10/3/2011	11:00:46 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	11:00:46 AM	Tube furnace set to 1000
10/3/2011	11:00:57 AM	Helium valve closed
10/3/2011	11:00:57 AM	BCl3 valve closed
10/3/2011	11:00:57 AM	PH3 valve closed
10/3/2011	11:00:57 AM	SiCl4 pre valve closed
10/3/2011	11:00:57 AM	SiCl4 post valve closed
10/3/2011	11:00:57 AM	Main Vac valve closed
10/3/2011	11:00:57 AM	Bypass valve closed
10/3/2011	11:00:57 AM	Bubbler valve closed
10/3/2011	11:00:57 AM	H2 valve opened
10/3/2011	11:00:57 AM	Helium MFC set to  0.000000
10/3/2011	11:00:57 AM	H2 MFC set to  500.000000
10/3/2011	11:00:57 AM	BCl3 MFC set to  0.000000
10/3/2011	11:00:57 AM	PHl3 MFC set to  0.000000
10/3/2011	11:00:57 AM	SiCl4 MFC set to  0.000000
10/3/2011	11:00:57 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	11:00:57 AM	Tube furnace set to 1000
10/3/2011	11:01:59 AM	Helium valve closed
10/3/2011	11:01:59 AM	BCl3 valve closed
10/3/2011	11:01:59 AM	PH3 valve closed
10/3/2011	11:01:59 AM	SiCl4 pre valve closed
10/3/2011	11:01:59 AM	SiCl4 post valve closed
10/3/2011	11:01:59 AM	Main Vac valve closed
10/3/2011	11:01:59 AM	Bypass valve closed
10/3/2011	11:01:59 AM	H2 valve opened
10/3/2011	11:01:59 AM	Bubbler valve opened
10/3/2011	11:01:59 AM	Helium MFC set to  0.000000
10/3/2011	11:01:59 AM	H2 MFC set to  500.000000
10/3/2011	11:01:59 AM	BCl3 MFC set to  0.000000
10/3/2011	11:01:59 AM	PHl3 MFC set to  0.000000
10/3/2011	11:01:59 AM	SiCl4 MFC set to  0.000000
10/3/2011	11:01:59 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	11:01:59 AM	Tube furnace set to 1000
10/3/2011	11:02:00 AM	Helium valve closed
10/3/2011	11:02:00 AM	BCl3 valve closed
10/3/2011	11:02:00 AM	PH3 valve closed
10/3/2011	11:02:00 AM	SiCl4 pre valve closed
10/3/2011	11:02:00 AM	SiCl4 post valve closed
10/3/2011	11:02:00 AM	Main Vac valve closed
10/3/2011	11:02:00 AM	Bypass valve closed
10/3/2011	11:02:00 AM	H2 valve opened
10/3/2011	11:02:00 AM	Bubbler valve opened
10/3/2011	11:02:00 AM	Helium MFC set to  0.000000
10/3/2011	11:02:00 AM	H2 MFC set to  500.000000
10/3/2011	11:02:00 AM	BCl3 MFC set to  0.000000
10/3/2011	11:02:00 AM	PHl3 MFC set to  0.000000
10/3/2011	11:02:00 AM	SiCl4 MFC set to  0.000000
10/3/2011	11:02:00 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	11:02:01 AM	Tube furnace set to 1000
10/3/2011	11:22:01 AM	Helium valve closed
10/3/2011	11:22:01 AM	PH3 valve closed
10/3/2011	11:22:01 AM	Main Vac valve closed
10/3/2011	11:22:01 AM	Bypass valve closed
10/3/2011	11:22:01 AM	H2 valve opened
10/3/2011	11:22:01 AM	BCl3 valve opened
10/3/2011	11:22:01 AM	SiCl4 pre valve opened
10/3/2011	11:22:01 AM	SiCl4 post valve opened
10/3/2011	11:22:01 AM	Bubbler valve opened
10/3/2011	11:22:01 AM	Helium MFC set to  0.000000
10/3/2011	11:22:01 AM	H2 MFC set to  500.000000
10/3/2011	11:22:01 AM	BCl3 MFC set to  2.000000
10/3/2011	11:22:01 AM	PHl3 MFC set to  0.000000
10/3/2011	11:22:01 AM	SiCl4 MFC set to  50.000000
10/3/2011	11:22:01 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	11:22:01 AM	Tube furnace set to 1000
10/3/2011	11:38:01 AM	Helium valve closed
10/3/2011	11:38:01 AM	BCl3 valve closed
10/3/2011	11:38:01 AM	PH3 valve closed
10/3/2011	11:38:01 AM	SiCl4 pre valve closed
10/3/2011	11:38:01 AM	SiCl4 post valve closed
10/3/2011	11:38:01 AM	Main Vac valve closed
10/3/2011	11:38:01 AM	Bypass valve closed
10/3/2011	11:38:01 AM	H2 valve opened
10/3/2011	11:38:01 AM	Bubbler valve opened
10/3/2011	11:38:01 AM	Helium MFC set to  0.000000
10/3/2011	11:38:01 AM	H2 MFC set to  500.000000
10/3/2011	11:38:01 AM	BCl3 MFC set to  0.000000
10/3/2011	11:38:01 AM	PHl3 MFC set to  0.000000
10/3/2011	11:38:01 AM	SiCl4 MFC set to  0.000000
10/3/2011	11:38:01 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	11:38:01 AM	Tube furnace set to 975
10/3/2011	11:39:31 AM	Helium valve closed
10/3/2011	11:39:31 AM	BCl3 valve closed
10/3/2011	11:39:31 AM	PH3 valve closed
10/3/2011	11:39:31 AM	SiCl4 pre valve closed
10/3/2011	11:39:31 AM	SiCl4 post valve closed
10/3/2011	11:39:31 AM	Main Vac valve closed
10/3/2011	11:39:31 AM	Bypass valve closed
10/3/2011	11:39:31 AM	H2 valve opened
10/3/2011	11:39:31 AM	Bubbler valve opened
10/3/2011	11:39:31 AM	Helium MFC set to  0.000000
10/3/2011	11:39:31 AM	H2 MFC set to  500.000000
10/3/2011	11:39:31 AM	BCl3 MFC set to  0.000000
10/3/2011	11:39:31 AM	PHl3 MFC set to  0.000000
10/3/2011	11:39:31 AM	SiCl4 MFC set to  0.000000
10/3/2011	11:39:31 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	11:39:31 AM	Tube furnace set to 950
10/3/2011	11:41:01 AM	Helium valve closed
10/3/2011	11:41:01 AM	BCl3 valve closed
10/3/2011	11:41:01 AM	PH3 valve closed
10/3/2011	11:41:01 AM	SiCl4 pre valve closed
10/3/2011	11:41:01 AM	SiCl4 post valve closed
10/3/2011	11:41:01 AM	Main Vac valve closed
10/3/2011	11:41:01 AM	Bypass valve closed
10/3/2011	11:41:01 AM	H2 valve opened
10/3/2011	11:41:01 AM	Bubbler valve opened
10/3/2011	11:41:01 AM	Helium MFC set to  0.000000
10/3/2011	11:41:01 AM	H2 MFC set to  500.000000
10/3/2011	11:41:01 AM	BCl3 MFC set to  0.000000
10/3/2011	11:41:01 AM	PHl3 MFC set to  0.000000
10/3/2011	11:41:01 AM	SiCl4 MFC set to  0.000000
10/3/2011	11:41:01 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	11:41:01 AM	Tube furnace set to 925
10/3/2011	11:42:31 AM	Helium valve closed
10/3/2011	11:42:31 AM	BCl3 valve closed
10/3/2011	11:42:31 AM	PH3 valve closed
10/3/2011	11:42:31 AM	SiCl4 pre valve closed
10/3/2011	11:42:31 AM	SiCl4 post valve closed
10/3/2011	11:42:31 AM	Main Vac valve closed
10/3/2011	11:42:31 AM	Bypass valve closed
10/3/2011	11:42:31 AM	H2 valve opened
10/3/2011	11:42:31 AM	Bubbler valve opened
10/3/2011	11:42:31 AM	Helium MFC set to  0.000000
10/3/2011	11:42:31 AM	H2 MFC set to  500.000000
10/3/2011	11:42:31 AM	BCl3 MFC set to  0.000000
10/3/2011	11:42:31 AM	PHl3 MFC set to  0.000000
10/3/2011	11:42:31 AM	SiCl4 MFC set to  0.000000
10/3/2011	11:42:31 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	11:42:31 AM	Tube furnace set to 900
10/3/2011	11:44:02 AM	H2 valve closed
10/3/2011	11:44:02 AM	BCl3 valve closed
10/3/2011	11:44:02 AM	PH3 valve closed
10/3/2011	11:44:02 AM	SiCl4 pre valve closed
10/3/2011	11:44:02 AM	SiCl4 post valve closed
10/3/2011	11:44:02 AM	Main Vac valve closed
10/3/2011	11:44:02 AM	Bypass valve closed
10/3/2011	11:44:02 AM	Helium valve opened
10/3/2011	11:44:02 AM	Bubbler valve opened
10/3/2011	11:44:02 AM	Helium MFC set to  500.000000
10/3/2011	11:44:02 AM	H2 MFC set to  0.000000
10/3/2011	11:44:02 AM	BCl3 MFC set to  0.000000
10/3/2011	11:44:02 AM	PHl3 MFC set to  0.000000
10/3/2011	11:44:02 AM	SiCl4 MFC set to  0.000000
10/3/2011	11:44:02 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	11:44:02 AM	Tube furnace set to 875
10/3/2011	11:45:32 AM	H2 valve closed
10/3/2011	11:45:32 AM	BCl3 valve closed
10/3/2011	11:45:32 AM	PH3 valve closed
10/3/2011	11:45:32 AM	SiCl4 pre valve closed
10/3/2011	11:45:32 AM	SiCl4 post valve closed
10/3/2011	11:45:32 AM	Main Vac valve closed
10/3/2011	11:45:32 AM	Bypass valve closed
10/3/2011	11:45:32 AM	Helium valve opened
10/3/2011	11:45:32 AM	Bubbler valve opened
10/3/2011	11:45:32 AM	Helium MFC set to  500.000000
10/3/2011	11:45:32 AM	H2 MFC set to  0.000000
10/3/2011	11:45:32 AM	BCl3 MFC set to  0.000000
10/3/2011	11:45:32 AM	PHl3 MFC set to  0.000000
10/3/2011	11:45:32 AM	SiCl4 MFC set to  0.000000
10/3/2011	11:45:32 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	11:45:32 AM	Tube furnace set to 850
10/3/2011	11:47:02 AM	H2 valve closed
10/3/2011	11:47:02 AM	BCl3 valve closed
10/3/2011	11:47:02 AM	PH3 valve closed
10/3/2011	11:47:02 AM	SiCl4 pre valve closed
10/3/2011	11:47:02 AM	SiCl4 post valve closed
10/3/2011	11:47:02 AM	Main Vac valve closed
10/3/2011	11:47:02 AM	Bypass valve closed
10/3/2011	11:47:02 AM	Helium valve opened
10/3/2011	11:47:02 AM	Bubbler valve opened
10/3/2011	11:47:02 AM	Helium MFC set to  500.000000
10/3/2011	11:47:02 AM	H2 MFC set to  0.000000
10/3/2011	11:47:02 AM	BCl3 MFC set to  0.000000
10/3/2011	11:47:02 AM	PHl3 MFC set to  0.000000
10/3/2011	11:47:02 AM	SiCl4 MFC set to  0.000000
10/3/2011	11:47:02 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	11:47:02 AM	Tube furnace set to 825
10/3/2011	11:48:32 AM	H2 valve closed
10/3/2011	11:48:32 AM	BCl3 valve closed
10/3/2011	11:48:32 AM	PH3 valve closed
10/3/2011	11:48:32 AM	SiCl4 pre valve closed
10/3/2011	11:48:32 AM	SiCl4 post valve closed
10/3/2011	11:48:32 AM	Main Vac valve closed
10/3/2011	11:48:32 AM	Bypass valve closed
10/3/2011	11:48:32 AM	Helium valve opened
10/3/2011	11:48:32 AM	Bubbler valve opened
10/3/2011	11:48:32 AM	Helium MFC set to  500.000000
10/3/2011	11:48:32 AM	H2 MFC set to  0.000000
10/3/2011	11:48:32 AM	BCl3 MFC set to  0.000000
10/3/2011	11:48:32 AM	PHl3 MFC set to  0.000000
10/3/2011	11:48:32 AM	SiCl4 MFC set to  0.000000
10/3/2011	11:48:32 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	11:48:32 AM	Tube furnace set to 800
10/3/2011	11:50:02 AM	H2 valve closed
10/3/2011	11:50:02 AM	BCl3 valve closed
10/3/2011	11:50:02 AM	PH3 valve closed
10/3/2011	11:50:02 AM	SiCl4 pre valve closed
10/3/2011	11:50:02 AM	SiCl4 post valve closed
10/3/2011	11:50:02 AM	Main Vac valve closed
10/3/2011	11:50:02 AM	Bypass valve closed
10/3/2011	11:50:02 AM	Helium valve opened
10/3/2011	11:50:02 AM	Bubbler valve opened
10/3/2011	11:50:02 AM	Helium MFC set to  500.000000
10/3/2011	11:50:02 AM	H2 MFC set to  0.000000
10/3/2011	11:50:02 AM	BCl3 MFC set to  0.000000
10/3/2011	11:50:02 AM	PHl3 MFC set to  0.000000
10/3/2011	11:50:02 AM	SiCl4 MFC set to  0.000000
10/3/2011	11:50:02 AM	Bypass solenoid MFC set to  0.000000
10/3/2011	11:50:02 AM	Tube furnace set to 0
10/3/2011	12:05:02 PM	Helium valve closed
10/3/2011	12:05:02 PM	H2 valve closed
10/3/2011	12:05:02 PM	BCl3 valve closed
10/3/2011	12:05:02 PM	PH3 valve closed
10/3/2011	12:05:02 PM	SiCl4 pre valve closed
10/3/2011	12:05:02 PM	SiCl4 post valve closed
10/3/2011	12:05:02 PM	Main Vac valve closed
10/3/2011	12:05:02 PM	Bypass valve closed
10/3/2011	12:05:02 PM	Bubbler valve closed
10/3/2011	12:05:02 PM	Helium MFC set to  0.000000
10/3/2011	12:05:02 PM	H2 MFC set to  0.000000
10/3/2011	12:05:02 PM	BCl3 MFC set to  0.000000
10/3/2011	12:05:02 PM	PHl3 MFC set to  0.000000
10/3/2011	12:05:02 PM	SiCl4 MFC set to  0.000000
10/3/2011	12:05:02 PM	Bypass solenoid MFC set to  0.000000
10/3/2011	12:05:03 PM	Tube furnace set to 0
10/3/2011	1:05:03 PM	H2 valve closed
10/3/2011	1:05:03 PM	BCl3 valve closed
10/3/2011	1:05:03 PM	PH3 valve closed
10/3/2011	1:05:03 PM	SiCl4 pre valve closed
10/3/2011	1:05:03 PM	SiCl4 post valve closed
10/3/2011	1:05:03 PM	Main Vac valve closed
10/3/2011	1:05:03 PM	Bypass valve closed
10/3/2011	1:05:03 PM	Bubbler valve closed
10/3/2011	1:05:03 PM	Helium valve opened
10/3/2011	1:05:03 PM	Helium MFC set to  500.000000
10/3/2011	1:05:03 PM	H2 MFC set to  0.000000
10/3/2011	1:05:03 PM	BCl3 MFC set to  0.000000
10/3/2011	1:05:03 PM	PHl3 MFC set to  0.000000
10/3/2011	1:05:03 PM	SiCl4 MFC set to  0.000000
10/3/2011	1:05:03 PM	Bypass solenoid MFC set to  0.000000
10/3/2011	1:05:03 PM	Tube furnace set to 0
10/3/2011	1:05:08 PM	H2 valve closed
10/3/2011	1:05:08 PM	BCl3 valve closed
10/3/2011	1:05:08 PM	PH3 valve closed
10/3/2011	1:05:08 PM	SiCl4 pre valve closed
10/3/2011	1:05:08 PM	SiCl4 post valve closed
10/3/2011	1:05:08 PM	Main Vac valve closed
10/3/2011	1:05:08 PM	Bypass valve closed
10/3/2011	1:05:08 PM	Helium valve opened
10/3/2011	1:05:08 PM	Bubbler valve opened
10/3/2011	1:05:08 PM	Helium MFC set to  500.000000
10/3/2011	1:05:08 PM	H2 MFC set to  0.000000
10/3/2011	1:05:08 PM	BCl3 MFC set to  0.000000
10/3/2011	1:05:08 PM	PHl3 MFC set to  0.000000
10/3/2011	1:05:08 PM	SiCl4 MFC set to  0.000000
10/3/2011	1:05:08 PM	Bypass solenoid MFC set to  0.000000
10/3/2011	1:05:08 PM	Tube furnace set to 0
10/3/2011	1:10:08 PM	Helium valve closed
10/3/2011	1:10:08 PM	H2 valve closed
10/3/2011	1:10:08 PM	BCl3 valve closed
10/3/2011	1:10:08 PM	PH3 valve closed
10/3/2011	1:10:09 PM	SiCl4 pre valve closed
10/3/2011	1:10:09 PM	SiCl4 post valve closed
10/3/2011	1:10:09 PM	Main Vac valve closed
10/3/2011	1:10:09 PM	Bypass valve closed
10/3/2011	1:10:09 PM	Bubbler valve closed
10/3/2011	1:10:09 PM	Helium MFC set to  0.000000
10/3/2011	1:10:09 PM	H2 MFC set to  0.000000
10/3/2011	1:10:09 PM	BCl3 MFC set to  0.000000
10/3/2011	1:10:09 PM	PHl3 MFC set to  0.000000
10/3/2011	1:10:09 PM	SiCl4 MFC set to  0.000000
10/3/2011	1:10:09 PM	Bypass solenoid MFC set to  0.000000
10/3/2011	1:10:09 PM	Tube furnace set to 0
10/3/2011	1:10:10 PM	Helium valve closed
10/3/2011	1:10:10 PM	H2 valve closed
10/3/2011	1:10:10 PM	BCl3 valve closed
10/3/2011	1:10:10 PM	PH3 valve closed
10/3/2011	1:10:10 PM	SiCl4 pre valve closed
10/3/2011	1:10:10 PM	SiCl4 post valve closed
10/3/2011	1:10:10 PM	Main Vac valve closed
10/3/2011	1:10:10 PM	Bubbler valve closed
10/3/2011	1:10:10 PM	Bypass valve opened
10/3/2011	1:10:10 PM	Helium MFC set to  0.000000
10/3/2011	1:10:10 PM	H2 MFC set to  0.000000
10/3/2011	1:10:10 PM	BCl3 MFC set to  0.000000
10/3/2011	1:10:10 PM	PHl3 MFC set to  0.000000
10/3/2011	1:10:10 PM	SiCl4 MFC set to  0.000000
10/3/2011	1:10:10 PM	Bypass solenoid MFC set to  0.000000
10/3/2011	1:10:10 PM	Tube furnace set to 0
10/3/2011	1:11:03 PM	Helium valve closed
10/3/2011	1:11:03 PM	H2 valve closed
10/3/2011	1:11:03 PM	BCl3 valve closed
10/3/2011	1:11:03 PM	PH3 valve closed
10/3/2011	1:11:03 PM	SiCl4 pre valve closed
10/3/2011	1:11:03 PM	SiCl4 post valve closed
10/3/2011	1:11:03 PM	Main Vac valve closed
10/3/2011	1:11:03 PM	Bubbler valve closed
10/3/2011	1:11:03 PM	Bypass valve opened
10/3/2011	1:11:03 PM	Helium MFC set to  0.000000
10/3/2011	1:11:03 PM	H2 MFC set to  0.000000
10/3/2011	1:11:03 PM	BCl3 MFC set to  0.000000
10/3/2011	1:11:03 PM	PHl3 MFC set to  0.000000
10/3/2011	1:11:03 PM	SiCl4 MFC set to  0.000000
10/3/2011	1:11:03 PM	Bypass solenoid MFC set to  0.000000
10/3/2011	1:11:03 PM	Tube furnace set to 0
10/3/2011	1:12:03 PM	Helium valve closed
10/3/2011	1:12:03 PM	H2 valve closed
10/3/2011	1:12:03 PM	BCl3 valve closed
10/3/2011	1:12:03 PM	PH3 valve closed
10/3/2011	1:12:03 PM	SiCl4 pre valve closed
10/3/2011	1:12:03 PM	SiCl4 post valve closed
10/3/2011	1:12:03 PM	Bypass valve closed
10/3/2011	1:12:03 PM	Bubbler valve closed
10/3/2011	1:12:03 PM	Main Vac valve opened
10/3/2011	1:12:03 PM	Helium MFC set to  0.000000
10/3/2011	1:12:03 PM	H2 MFC set to  0.000000
10/3/2011	1:12:03 PM	BCl3 MFC set to  0.000000
10/3/2011	1:12:03 PM	PHl3 MFC set to  0.000000
10/3/2011	1:12:03 PM	SiCl4 MFC set to  0.000000
10/3/2011	1:12:03 PM	Bypass solenoid MFC set to  0.000000
10/3/2011	1:12:03 PM	Tube furnace set to 0
10/3/2011	3:52:03 PM	Run finished at 3:52 PM
10/3/2011	5:52:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/3/2011	5:52:12 PM	Recipe started at 5:52 PM
10/3/2011	5:52:12 PM	Helium valve closed
10/3/2011	5:52:12 PM	H2 valve closed
10/3/2011	5:52:12 PM	BCl3 valve closed
10/3/2011	5:52:12 PM	PH3 valve closed
10/3/2011	5:52:12 PM	SiCl4 pre valve closed
10/3/2011	5:52:12 PM	SiCl4 post valve closed
10/3/2011	5:52:12 PM	Main Vac valve closed
10/3/2011	5:52:12 PM	Bypass valve closed
10/3/2011	5:52:12 PM	Bubbler valve closed
10/3/2011	5:52:12 PM	Helium MFC set to  0.000000
10/3/2011	5:52:12 PM	H2 MFC set to  0.000000
10/3/2011	5:52:12 PM	BCl3 MFC set to  0.000000
10/3/2011	5:52:12 PM	PHl3 MFC set to  0.000000
10/3/2011	5:52:12 PM	SiCl4 MFC set to  0.000000
10/3/2011	5:52:12 PM	Bypass solenoid MFC set to  0.000000
10/3/2011	5:52:12 PM	Tube furnace set to 0
10/3/2011	5:52:15 PM	H2 valve closed
10/3/2011	5:52:15 PM	BCl3 valve closed
10/3/2011	5:52:15 PM	PH3 valve closed
10/3/2011	5:52:15 PM	SiCl4 pre valve closed
10/3/2011	5:52:15 PM	SiCl4 post valve closed
10/3/2011	5:52:15 PM	Main Vac valve closed
10/3/2011	5:52:15 PM	Bypass valve closed
10/3/2011	5:52:15 PM	Bubbler valve closed
10/3/2011	5:52:15 PM	Helium valve opened
10/3/2011	5:52:15 PM	Helium MFC set to  500.000000
10/3/2011	5:52:15 PM	H2 MFC set to  0.000000
10/3/2011	5:52:15 PM	BCl3 MFC set to  0.000000
10/3/2011	5:52:15 PM	PHl3 MFC set to  0.000000
10/3/2011	5:52:15 PM	SiCl4 MFC set to  0.000000
10/3/2011	5:52:15 PM	Bypass solenoid MFC set to  0.000000
10/3/2011	5:52:15 PM	Tube furnace set to 0
10/3/2011	5:53:21 PM	Helium valve closed
10/3/2011	5:53:21 PM	H2 valve closed
10/3/2011	5:53:21 PM	BCl3 valve closed
10/3/2011	5:53:21 PM	PH3 valve closed
10/3/2011	5:53:21 PM	SiCl4 pre valve closed
10/3/2011	5:53:21 PM	SiCl4 post valve closed
10/3/2011	5:53:21 PM	Main Vac valve closed
10/3/2011	5:53:21 PM	Bypass valve closed
10/3/2011	5:53:21 PM	Bubbler valve closed
10/3/2011	5:53:21 PM	Helium MFC set to  0.000000
10/3/2011	5:53:21 PM	H2 MFC set to  0.000000
10/3/2011	5:53:21 PM	BCl3 MFC set to  0.000000
10/3/2011	5:53:21 PM	PHl3 MFC set to  0.000000
10/3/2011	5:53:21 PM	SiCl4 MFC set to  0.000000
10/3/2011	5:53:21 PM	Bypass solenoid MFC set to  0.000000
10/3/2011	5:53:21 PM	Tube furnace set to 0
10/3/2011	5:53:22 PM	Run finished at 5:53 PM
10/3/2011	5:53:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/3/2011	5:55:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/3/2011	5:55:37 PM	Recipe started at 5:55 PM
10/3/2011	5:55:37 PM	Helium valve closed
10/3/2011	5:55:37 PM	H2 valve closed
10/3/2011	5:55:37 PM	BCl3 valve closed
10/3/2011	5:55:37 PM	PH3 valve closed
10/3/2011	5:55:37 PM	SiCl4 pre valve closed
10/3/2011	5:55:37 PM	SiCl4 post valve closed
10/3/2011	5:55:37 PM	Main Vac valve closed
10/3/2011	5:55:37 PM	Bubbler valve closed
10/3/2011	5:55:37 PM	Bypass valve opened
10/3/2011	5:55:37 PM	Helium MFC set to  0.000000
10/3/2011	5:55:37 PM	H2 MFC set to  0.000000
10/3/2011	5:55:37 PM	BCl3 MFC set to  0.000000
10/3/2011	5:55:37 PM	PHl3 MFC set to  0.000000
10/3/2011	5:55:37 PM	SiCl4 MFC set to  0.000000
10/3/2011	5:55:37 PM	Bypass solenoid MFC set to  0.000000
10/3/2011	5:55:37 PM	Tube furnace set to 0
10/3/2011	5:56:43 PM	Helium valve closed
10/3/2011	5:56:43 PM	H2 valve closed
10/3/2011	5:56:43 PM	BCl3 valve closed
10/3/2011	5:56:43 PM	PH3 valve closed
10/3/2011	5:56:43 PM	SiCl4 pre valve closed
10/3/2011	5:56:43 PM	SiCl4 post valve closed
10/3/2011	5:56:43 PM	Main Vac valve closed
10/3/2011	5:56:43 PM	Bubbler valve closed
10/3/2011	5:56:43 PM	Bypass valve opened
10/3/2011	5:56:43 PM	Helium MFC set to  0.000000
10/3/2011	5:56:43 PM	H2 MFC set to  0.000000
10/3/2011	5:56:43 PM	BCl3 MFC set to  0.000000
10/3/2011	5:56:43 PM	PHl3 MFC set to  0.000000
10/3/2011	5:56:43 PM	SiCl4 MFC set to  0.000000
10/3/2011	5:56:43 PM	Bypass solenoid MFC set to  0.000000
10/3/2011	5:56:44 PM	Tube furnace set to 0
10/3/2011	5:57:44 PM	Helium valve closed
10/3/2011	5:57:44 PM	H2 valve closed
10/3/2011	5:57:44 PM	BCl3 valve closed
10/3/2011	5:57:44 PM	PH3 valve closed
10/3/2011	5:57:44 PM	SiCl4 pre valve closed
10/3/2011	5:57:44 PM	SiCl4 post valve closed
10/3/2011	5:57:44 PM	Bypass valve closed
10/3/2011	5:57:44 PM	Bubbler valve closed
10/3/2011	5:57:44 PM	Main Vac valve opened
10/3/2011	5:57:44 PM	Helium MFC set to  0.000000
10/3/2011	5:57:44 PM	H2 MFC set to  0.000000
10/3/2011	5:57:44 PM	BCl3 MFC set to  0.000000
10/3/2011	5:57:44 PM	PHl3 MFC set to  0.000000
10/3/2011	5:57:44 PM	SiCl4 MFC set to  0.000000
10/3/2011	5:57:44 PM	Bypass solenoid MFC set to  0.000000
10/3/2011	5:57:44 PM	Tube furnace set to 0
10/3/2011	5:57:45 PM	Run finished at 5:57 PM
10/3/2011	5:57:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
